Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø6 One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

KB

D L A2 A1 M Part No.

VCC

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

High Power Cylinder:

Auto Switches/Refer to p.5.3-2 for further information on auto switch.

CEx-OMG0106

Connect head cover tubing wisely with consideration of surrounding conditions. 15 Driving Direction Left Right Brake O per ating P ort Brake Release P ort Head Cover-WL Head Cover-WR Tube Part No. 1 2 3 4 5 6 Head Cover Type Head Cover-WL Head Cover-WR Tubing Side Front Side Bottom Front Side Bottom Driving Left A C E G I K Direction Right B D F H J L Note

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

EXxx-OMS0026CN

A IN L/A IN L/A OUT LINK L/A INL/A OUT 11 OUT L/A OUT RUN L/A IN L/A OUT LINK MS [](64 ) RUN MS: LED 27 MS: SI NS: IP IP [IP ]( 19 ) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.

Pin Cylinders Series CJP2/CJP

d m t L d m t D d9 D d9 l l Part no.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 841 1402 1962 63 OUT 935 1559 2182 IN 1361 2268 3175 80 OUT 1508 2513 3519 IN 2144 3574 5003 100 OUT 2356 3927 5498 Intermediate Strokes Installation of spacer on standard stroke body. Method Model no. Refer to page 4 for standard model no.

Compact Cylinder with Lock Series CLQ

M6 x 80 L M10 x 100 L M5 x 55 L 65 80 100 55 CL1 -15D -15D x 70 L x 85 L x 105 L x 60 L 70 85 105 60 -20D -20D x 75 L x 90 L x 110 L x 65 L 75 90 110 65 MLGC -25D -25D x 80 L x 95 L x 115 L x 70 L 80 95 115 70 -30D -30D x 85 L x 100 L x 120 L x 75 L 85 100 120 75 10.5 CNG -35D -35D 7 12.5 17 x 90 L x 105 L x 125 L x 80 L 90 105 125 80 -40D -40D x 95 L x 110 L x 130 L x 85 L 95 110 130 85

Vacuum Gripper

(PD) One-touch fitting (4) Internal Max. vacuum pressure [kPa] note4) -84 Suction flow rate [L/min(ANR)] note4) 17 Vacuum ejector Air consumption [L/min(ANR)] note4) 57 Supply pressure range [MPa] 0.3 to 0.55 Standard supply pressure [MPa] note5) 0.5 Model ZSE20---M5-LA2 Power supply voltage [V] 12 to 24 VDC 10% Ripple (p-p) 10% or less Rated pressure range [kPa] 0 to -101 Pressure switch