Fieldbus system Digital unit

Input signal assignment (EX600-DX B) Connector number 0 1 2 3 Connector position Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Input signal Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Input signal assignment (EX600-DX C ) Connector number 0 1 2 3 4 5 6 7 Connector position Input signal Pin 4 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Input signal assignment (EX600-DX D) Connector number 0 1 2 3 4 5 6 7 Connector

RZQ

Static mounting: Foot style, Front flange style Rotation bracket: Double clevis CV C A First-stage stroke MVGQ CC RB wFirst-stage extension by pressurizing A and C ports and intermediate stop.

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

SMC

3.8 NA-M3 x 0.5 thread depth 4 K 14.6 7 3.5 3.8 7 6.5 4 6.5 8 5.5 J 6 Max. 9.5 (With stroke adjuster at retraction end) I 7 Operating port 2-M5 x 0.8 2 2-M3 x 0.5 thread depth 4 3H9 depth 3 +0.025 0 HA GA B A 3H9 depth 3 +0.025 0 NN-M4 x 0.7 thread depth 8 4 1 6.5 7 7 15 3.2 B A 6.5 13 6.5 13 H (NN1) x H G Section AA Section BB (mm) Model F 25 25 40 50 38 50 ZZ 74 79 90 108 126 176 M 49 54

Series KP/KPQ/KPG

1MPa = 145 psi F = (1.8 x C) + 32 4 Clean One-Touch Fittings Series KP How to Order KP H 06 KP P 08 01 Applicable fitting size Port size/Applicable tubing O.D.

Series KP/KPQ/KPG

1MPa = 145 psi F = (1.8 x C) + 32 4 Clean One-Touch Fittings Series KP How to Order KP H 06 KP P 08 01 Applicable fitting size Port size/Applicable tubing O.D.

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Note 2) The withstand voltage specification for the wiring unit section is JIS C 0704, Grade 1 or its equivalent.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1396.5 1006 1070 14 5 1000 80 11-LEJS63S-12001556.5 1596.5 1206 1270 16 6 1200 80 11-LEJS63S-15001856.5 1896.5 1506 1570 18 7 1400 180 536 LEJ Series Auto Switch Mounting Auto Switch Mounting Position (C) B (Table center) A [mm] Model Size A B C Operating range LEJS 40 77 80 160 5.5 LEJB 5.0 LEJS 63 83 86 172 7.0 LEJB 6.5 Note) The operating range is a guideline including hysteresis, not

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

Suction cups with flange

7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2

Slider Type Ball Screw Drive/11-LEFS Series

0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

MTS

7 Type C snap ring for hole Carbon tool steel Aluminum alloy !8 !

IP8101 Series

When users definition (USEr) is set, the following 11 data can be set 7.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

IDX-OM-W023

IDX-OM-W023 7 C 7 C 7-1 7-2 1) 2) IDU Series 7-1 71 IDX-OM-W023 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

LEYx-OMZ0015

7 12 13 14 15 1 2 3 4 5 6 8 In-line [LEY63] In-line [LEY25/32] Rod end male thread 26 24 32 26 29 30 27 28 27 31 27 28 27 25 7 Parts list No.

VP300/500/700

override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With