Table of Contents

70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54

SMC

70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54

Electric Actuator

less 50 70 85 100 100 70 20 15 104F (40C) LEY25 LEY25 112 31.5 Lead 3: LEY25AC Lead 3: LEY25C 27 Lead 6: LEY25AB 90 Lead 6: LEY25B 22.5 Lead 12: LEY25AA Force [lbf] Force [lbf] Lead 12: LEY25A 67.4 8 13.5 45 9 22.5 4.5 Max. 65% 0 30 40 50 60 70 80 90 0 40 50 60 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Max. 95% Set value of pushing force [%] Duty ratio [%

Mechanically Jointed Rodless Cylinder Series MY1

100 Side support B MY-S63B 2 x M12 x 1.75 70 100 A B Dimensions (mm) Model A Applicable bore size B 304 MY1HT50 284 314 MY-S63A B MY1HT63 334 A set of side supports consists of a left support and a right support.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

PNY-70 NLP-300A P7 Air-hydro Retaining plate gasket Bore size (mm) Kit no.

1

to 50 48 38 20 90 41 12 52 10 (73) 125 (135) 63 zz i h f e d c a b Bore size (mm) 125 140 160 180 200 250 300 48 38 20 110 41 14 52 12 (84.5) 138.5 (148.5) 74.5 CP95 318 90 110 40 27 36 43 70 M30 x 1.5 Note) Applicable stroke available by the 5 mm interval. 318 90 110 40 27 36 43 70 M30 x 1.5 Series CQS NCM 336 90 110 40 27 36 43 70 M30 x 1.5 G ML MK MA MT A B L Stroke Bore size (mm) 12

Rotary Table/Rack & Pinion Style Series MSQ

25 Size: 10 to 50 Size: 70 to 200 Carbon steel 26 Anodized Anodized Chromated NBR Brass NBR Stainless steel 27 28 29 30 31 Size: 70 to 200 only Size: 70 to 200 only Replacement parts Description Size 10 P523010-5 20 P523020-5 30 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P391070-5 Seal kit No.

Table of Contents

4 70 >= 7 >= 70, 9= 5,'., ?4 0( 9= 5,'., ?

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5

Thermo-con

flow rate: 1.3 gpm (5 L/min) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) Circulating fluid: 20% ethylene glycol HEC003 Circulating fluid: Clear water 50 70 90 110 130 150 F 50 70 90 110 130 150 F 1000 1000 800 800 Cooling capacity (W) Cooling capacity (W) Facility water: 68F (20C) Facility water: 50F (10C) 600 600

Table of Contents

70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

Air Cylinder Series MB

75 80 90 85 75 + 30 (n 2) (n = 2, 4, 6, 8) 80 + 30 (n 2) (n = 2, 4, 6, 8) 90 + 30 (n 2) (n = 2, 4, 6, 8) 85 + 30 (n 2) (n = 2, 4, 6, 8) 70 + 30 (n 2) (n = 2, 4, 6, 8) n (Different surfaces) D-A44 70 + 50 (n 2) (n = 2, 4, 6, 8) 85 + 50 (n 2) (n = 2, 4, 6, 8) 90 + 50 (n 2) (n = 2, 4, 6, 8) 75 + 50 (n 2) (n = 2, 4, 6, 8) 80 + 50 (n 2) (n = 2, 4, 6, 8) n (Same surface) 1 70 75 80 85

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Load-side encoder initial communication error 1 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side encoder initial communication Process error 4 DB 70.E Load-side encoder initial communication Process error 5 DB 70.F Load-side encoder

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

CXS

, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series

Electric Actuators

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Modular F.R.L. Units

147.1 18 35.5 38.4 40 35.5 50 52 26 8.5 12.5 70 2.3 35 186.9 155.6 153.9 149.6 154.1 169.6 174.1 AF40-06-A 3/4 75 149.1 20 35.5 38.4 40 35.5 50 52 25 8.5 12.5 70 2.3 34 188.9 157.6 155.9 151.6 156.1 171.6 176.1 AF50-A 3/4, 1 90 220.1 24 45 30 45 70 66 35 11 13 90 3.2 47 259.9 228.6 226.9 222.6 227.1 242.6 247.1 AF60-A 1 95 234.1 24 47.5 30 47.5 70 66 35 11 13 90 3.2 47 273.9 242.6 240.9