Compact End Lock Cylinder Series CBQ2

50 75 100 Non-locking type Front lock CBQ2 Rubber bumper 32, 40, 50, 63 Rear lock Locking type Series CBQ2 How to Order B 50 D C 32 H L CBQ2 Standard A93 S B 50 D C CDBQ2 With Auto Switch 32 H L Number of auto switches With auto switch (built-in magnet) 2 pcs. 1 pc.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75 (2.6) 125 (44) Inlet air pressure MPa (psi) 0.7 (101) Inlet air temperature C (F) 25 (77) 25 (77) 25 (77) 1l/min (ANR) (0.03SCFM) {inlet air pressure at 0.7MPa} (101psi) Inlet air saturation temperature C (F) Ambient temperature C (F) Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

SMC Wireless System PROFINET compatible

[May 2019] C: Contents are added. [September 2019] D: Contents are added.

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Compact

Example) CQ-M3 x 25 L 2 pcs.

PA300/500/700

(Value in the initial stage) Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5

VM

Only when output 1 and 2 are in the ON state, and C turns ON, will output 3 turn ON. If either A or B is turned OFF , output 3 will not be turned ON, even if C is turned ON.

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

CC

72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50 24 40 40 28 100

PSxx-OMV0008CN

OUT2 DC(-) IO-Link L+ C/Q IO-Link DO L-20No.PS-OMV0008CN-E [] 3 0.2 [] / UP DOWN OUT1 OUT1 OUT2 OUT2 [F10]30 () SET 1~3 SET 3~5 SET [] [] [] [3 ] (27 ) (58 ) (23 ) (25 ) 30 () 3 -21No.PS-OMV0008CN-E ON OFF ON P_1 H_1 ON OFF ISE70G ISE75G ISE76G ISE77G ISE78G [P_1] OUT1[MPa] 0.500 1.000 2.50 5.00 8.00 [H_1] OUT1[MPa] 0.050 0.100 0.25 0.50 0.80 OUT2 -22No.PS-OMV0008CN-E

Digital Pressure Switch

[February 2020] C: Contents are added. [February 2021] D: Contents revised in several places.

Air-hydro Unit

1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115

Compact Electric Actuator Series LG1

MC NFB Servomotor HC-PQ Power supply Single phase 200VAC (Type A) or Single phase 100VAC (Type A1) C P U L1 U V V W Servo amp SM L2 W MR-CA E or MR-CA1 The length of the cable between the controller and servo amp is 2m or less.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Latching Operation Indicator light A-C ON (Set) Vacuum generation Orange B-C ON (Reset) Vacuum stop Green N.C. Operation Indicator light A-C ON (Set) Vacuum generation Orange OFF Vacuum stop If the supply valve is latching type, continuous energization is not necessary because it maintains the switching position with momentary energization for at least 10 msec.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

DO w DI Blue L e L 10 ISE7m/7mG Series Dimensions Without bracket Bracket A (Interchangeable with ISE70/ISE75(H)) (Part no.: ZS-50-A) 48 49 10 (40.1) 34 (26) 15 14 6.5 80.4 70.4 (11.4) 8 1.6 46 25 60 Bracket B (Part no.: ZS-50-B) 49 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no

SI Unit

to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) Atmospheric pressure Operation:80 kPa to 108 kPa (under 2000m) Storage: 66 kPa to 108 kPa (under 3500m) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z EN 60068-2-6 Vibration resistance Impact resistance 147 m/s2 is given 3 times