Aluminum High Vacuum Angle Valve 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0 0 50 100
Setting X Technical documentation giving detailed specification information can be found on the SMC website (URL http://www.smcworld.com). 100 1 10 0 0 0 Remote control 1 0 0 1 Caution Outline Dimensions 0 2 0 2 Manual set up of IP address : : : : After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.
If the valve is located in the circulating fluid line, do not fully close the valve (flow rate: 0 L/min). The pump may get damaged.
Object instance Present value of maintenance counter 0 to 4294967295 (0 to F H) 0x66 Maintenance Counter Maintenance counter threshold over flag 0: Maintenance counter 0x67 Maintenance Counter Exceed value < Threshold 1: Maintenance counter value > Threshold Threshold of maintenance counter 0 to 4294967295 (0 to F H) The set value is immediately reflected. 0x68 Threshold Maintenance Counter
The operating fluid temperature range is 0 to 50 oC and the product for high temperature fluid is 0 to 90 oC, and operating temperature range is 0 to 50 oC. If the fluid freezes, it may cause damage and malfunction of the product, so please take measures to prevent freezing.
L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping For EX260-SEN1/-SEN2 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SEN3/-SEN4
5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa 101 to 101 kPa 0 to 101 kPa 100 to 100 kPa Set pressure range 12 to 24 VDC (Ripple p-p 10% or less) Voltage 2% F.S. or less (0 to 50C: based on 25C) 3% F.S. or less
EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12
' &30 0 5 6 !!"0 44 & 111 ((( 35 44 & $ ' ' & "" ()*+. /# ,VV061 &30 ! // 44 44 $ %& ' V100 !" # $% S070 &30 0 5 6 !!"0 44 & / ! ! ' VQD 111 ((( $ ' ' VKF & VK ! "# VT "" ()*+ "" ,VS &30 ! // 4 $ ! "# %& 0" ' &30 0 5 6 !!"0 44 & / ! ! ' & * !2 111 ((( 35 44 & $ ' ' &30 ! // 4 $ ! "# %& ! ' &30 0 5 6 !!"0 44 & ( 3 ,' & ,' ' ' ( * !
0 to 0.7 0 to 0.7 0 to 0.7 100 kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.
M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken
Example pressure displays (shading indicates changed displays) ISE75(for 10 MPa) Cut-to-zero display function ON: 0 Displayed as 0 0.4 0.5 0.6 9.9 10.0 Cut-to-zero display function OFF: 0 0.1 0.2 0.3 0.4 0.5 0.6 9.9 10.0 ISE75H(for 15 MPa) Cut-to-zero display function ON: 0 Displayed as 0 0.5 0.6 14.9 15.0 Cut-to-zero display function OFF: 0 0.1 0.2 0.3 0.4 0.5 0.6 14.9
@smcromania.ro Russia +7 8127185445 www.smc-pneumatik.ru info@smc-pneumatik.ru Slovakia +421 (0)413213212 www.smc.sk office@smc.sk Slovenia +386 (0)73885412 www.smc.si office@smc.si Spain +34 902184100 www.smc.eu post@smc.smces.es Sweden +46 (0)86031200 www.smc.nu post@smc.nu Switzerland +41 (0)523963131 www.smc.ch info@smc.ch Turkey +90 212 489 0 440 www.smcpnomatik.com.tr info@smcpnomatik.com.tr
End-lock type (Cylinder with end lock) 16 20 25 32 40 Lock position Single side (selectable), both sides Holding force (max.)N 110 170 270 450 700 Stroke fine adjustment range (mm) 0 to -5.6 0 to -6 0 to -11.5 0 to -12 0 to -16 Backlash 1mm or less Manual release Possible (Non-locking type) Warning 1.
0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 322 Clean Air Filter SFD Series Construction SFD100-C Component Parts Material No.
NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg