Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.O. (Normally Open) at non-pressurized

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.O. (Normally Open) at non-pressurized

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT3/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized

Regulator Unit Combination: Air Filter + Regulator, Port Size: NPT3/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual] N.C. (Normally Closed) at non-pressurized

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 772

HRX-OM-X010

Circulating Fluid: Fluorinated Fluid Operating Temperature: 20 deg C At maximum frequency operation by inverter HRZ008-L-F [ 6 0 H z ] 1.2 [ 6 0 H z ] 1.1 1.0 [Supply Port] [ 5 0 H z ] 0.9 Pressure [MPa] 0.8 [ 5 0 H z ] 0.7 0.6 0.5 0.4 0.3 [Return Port] 0.2 0.1 0.0 0 5 10 15 20 25 30 35 40 Flow Rate [L/min] Fig. 8-14 Pump Performance Curve ( HRZ008-L-F ) When circulating fluid flow rate lowers

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

(PNP) 2-wire IC circuit 5 V,12 V Reed switch Solid state switch 12 V Yes Grommet Diagnostic indication (2-color indication) IC circuit 5 V,12 V Relay, PLC 24 V 12 V Water resistant (2-color indication) IC circuit 5 V,12 V 12 V 3-wire (NPN equiv.)

VZ5000

(Values at the initial period) Solenoid Specifications Option Grommet (G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D) 100, 200, 24, 48, 110, 220 Electrical entry AC 50/60 Hz DC Coil rated voltage (V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Power consumption (W

Heat Resistant 2-Color Indicator

Choice of output types: PNP, NPN How to Order D-M9PJ J M9 N L D Output specifications Lead wire length Symbol Specication L Between the sensor and amplier: 3 m, Amplier section: 3 m Symbol Specication N NPN output P PNP output Z Between the sensor and amplier: 5 m, Amplier section: 3 m D-M9NJ Dimensions [mm] Auto Switch Specications Indicator light D-M9NJ, D-M9PJ (With indicator light) Auto

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

A96V IC circuit Reed switch 5 V A96 Yes Grommet 2-wire IC circuit Relay, PLC A90V A93V A90 A93 100 V 5 V, 12 V 12 V 24 V No Yes *Solid state switches marked with a symbol are produced upon receipt of order. *39 in (1 m: M): Available in the D-M9W(V) only. *Lead wire length symbols: 20in (0.5 m) Nil (Example) M9NW 39in (1 m) M M9NWM 118in (3 m) L M9NWL 197in (5 m) Z M9NWZ 1

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

24 V Yes Grommet 3-wire (NPN) Diagnostic indication 2-color indication 5V, 12V IC circuit 3-wire (PNP) 12 V 2-wire A96 A93 A90 A96V A93V A90V 5 V IC circuit 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 2-wire 24 V 5 V, 12 V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

MHC2-6/MHCA2-6

Lead wire length (m) Indicator light Load voltage Auto switch model Wiring (Output) 0.5 (Nil) 1 (M) 3 (L) Applicable load Pre-wired connector Type Special function Electrical entry 5 (Z) DC AC In-line Perpendicular M9NV M9PV M9BV M9N M9P M9B 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V Solid state switch IC circuit Relay, PLC 24 V 12 V Grommet Yes Lead wire length symbols: Auto switches

Multistage Ejector Series ZL

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

4

D-G

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied