IDX-OM-W013

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

CM2x-OM0230Q

D-A90A93A96A90VA93VA96V 3. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

voltage fluctuation 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 0.35 (With light: 0.4) DC Standard Power consumption (W) 0.1 (With light only) With power saving circuit 1.4 (With light: 1.5) 100 V 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 1.6 (With light: 1.7) [1.7 (With light: 1.8)] 110 V [115 V] 3 position closed center 3 position closed center Apparent power VA (B) 2 (A) 4 (B) 2 (A

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center Apparent power VA (B) 2 (A) 4 (B) 2 (A) 4 AC 200 V 2.3 (With indicator light: 2.4) 2.5 (With indicator light: 2.6) [2.7 (With indicator light: 2.8)] 220 V [230 V] 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Surge voltage suppressor Diode (Non-polarity type: valistor) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 Indicator light LED In common between 110 VAC and 115

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

Digital Pressure Switch

The unnecessary output should remain unconnected. -27 NPN open collector 2 outputs Max. 30 V, 80 mA, Residual voltage 1 V or less -43 NPN open collector 1 output + PNP open collector 1 output Max. 30 V (NPN), 80 mA, Residual voltage 1 V or less A Pressure set value of switch output for NPN and PNP is common. -65 PNP open collector 1 output Max. 80 mA -67 PNP open collector 2 outputs Max.

IDX-OM-W094

A B GR A B AC 230V50Hz SY BU BR YE OR G/Y / IDFA60/70/80/90 Series 12-4 IDX-OM-W094 V 13 V V 13.1 0 () 13.2 (12mm) 12mm IDF-S0534 1.6MPa ON 0.510 OFF 0.55 IDFA60/70/80/90 Series 13-1 IDX-OM-W094 V 13.3 TEST TEST OFF ON OFF ON 3 2 6 4 1 2 4 8 5 0.5 10 0.5 min s IDFA60/70/80/90 Series 13-2 IDX-OM-W094 14 14.1 / IDFA60/70/80/90 Series 14-1 Revision history 4-14-1

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Lock unit

Chamfer Chamfer (1) For male thread (2) For female thread 30 30 D-2 D-2 D D Fig. 2 Rod end style Do not apply excessive lateral load or external force to the lock unit. They may break the lock unit. Do not use the product in applications where the rod rotates. Do not apply loads with impact, strong vibration or rotational forces while the lock mechanism is activated.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

180 ° Angular Type Air Gripper Cam Type MHY2 Series ø 10, ø 16, ø 20, ø 25

-wire(NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) M9BAV M9BA 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of order.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

CYP

5 V, 12 V Y7P Y7PV IC circuit 3-wire (PNP) Y59B Y69B 12 V 2-wire Relay, PLC Solid state switch 24 V Y7NW Y7NWV Grommet Yes 3-wire (NPN) Diagnostic indication (2-color indication) 5 V , 12 V IC circuit Y7PW Y7PWV 3-wire (PNP) Y7BW Y7BWV 12 V 2-wire Lead wire length symbols: 0.5 m Nil (Example) Y69B 3 m L Y69BL 5 m Z Y69BZ Auto switches marked with a symbol are produced upon receipt

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

Series SY100 3 Port Solenoid Valve Rubber Seal

Note 2) Value for DC. Add 1g for AC.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

2-wire 3-wire(NPN) IC circuit Diagnosis (2-color indicator) MHW MHW 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire -X M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) MRHQ M9BAV M9BA 12 V 2-wire Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.