CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

Mechanically Jointed Rodless Cylinder Series MY2

400500 1000 1500 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s 1092 Mechanically Jointed Rodless Cylinder Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 MY1B 300 300 300 MY1M 200 200 200 MY1C 100 100 100 MY1H MY1HT Moment Nm Moment Nm Moment Nm 50 50 50 MY1W MY2HT40 MY2HT40 MY2HT40 40 40 40 MY2C 30 30

Vacuum Unit Ejector / Vacuum Pump System

selection function Note 12) NPN 2 outputs F SI unit only Note 13) -100 to 100 H PNP Unit selection function Note 12) 2 outputs J SI unit only Note 13) K Unit selection function Note 12) NPN Pressure switch for 1 output Q SI unit only Note 13) -100 to 100 vacuum with energy R PNP Unit selection function Note 12) saving function Note 11) 1 output S SI unit only Note 13) N Without pressure

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

Air cylinder

L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.

KR

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Compressed Air Cleaning Filter Series

AFF2C AFF4C AFF8C AFF11C AFF22C AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Rated flow (l/min (ANR)) Note) 750 1500 2200 3700 6000 12000 12000 22000 28000 42000 300 50(2B) 80(3B) 100(4B) 100(4B) 1 8, 1 4 1 4, 3 8 3 8, 1 2 1 1 2, 3 4 Port size 3 4, 2 11 2, 1 1, 1 2 JIS 10K FF flange Mass (kg) 0.55 0.9 1.4 2.1 4.2 0.38 10.5 50 52 72 87 Note) Max. flow at 0.7 MPa.

Stainless Steel 316 Fittings

3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

323 3 58 68 87.5 98 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 L1 L2 L3 L4 31 Series VQZ Base Mounted Type Dimensions: VQZ300 VQZ300 (mm) VV3QZ35C Stations Port size (35) (5.5) 2-4.5 Mounting holes 42 (11) Grommet (G) N7T: One-touch fitting for 1/4" n-N7T, N9T, N11T, 02T 34 (7.5) (3) DIN rail

MY1

64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202 M12 x 1.75 70 100 18.3 10.5 17.5 11.5 B A set of side supports consists of a left support and a right support.

Microspeed Cylinder

type in a class 100 clean room.

7

(for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Compact Type

7 V = up to 800mm/s 0.2 0.1 Weight m (kg) 0.05 0.04 0.03 CXSJM6 0.02 CXSJL6 20 40 0.01 60 0 Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 30 mm stroke 10 11 CXSJM CXSJL Graph V = up to 400 mm/s; up to 30 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8

MHZ2/MHZJ2

D-Y7NW(V) Auto Switch Weight Table DC (+) Brown [Red] Unit: g Main switch circuit OUT Black [White] D-Y7BW D-Y7PW Model D-Y7NW 11 11 11 Lead wire length 0.5m 54 54 54 Lead wire length 3m DC () Blue [Black] Auto Switch Dimensions D-Y7PW(V) D-Y7W DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-Y7BW(V) OUT (+) Brown [Red] Main switch circuit D-Y7WV OUT () Blue [

Compact Type Dual-Rod Cylinder Series CXSJ

7 V = up to 800mm/s 0.2 0.1 Weight m (kg) 0.05 0.04 0.03 CXSJM6 0.02 CXSJL6 20 40 0.01 60 0 Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 30 mm stroke 10 11 CXSJM CXSJL Graph V = up to 400 mm/s; up to 30 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max