Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(For DIN rail mounting) (7.5) Manifold block internal wiring specifications 11.8 S: Single wiring D: Double wiring L Dimension n: Stations L n 2 198 187.5 162.8 17.5 63 3 198 187.5 173.3 12.5 73.5 4 210.5 200 183.8 13.5 84 5 223 212.5 194.3 14.5 94.5 6 235.5 225 204.8 15.5 105 7 248 237.5 215.3 16.5 115.5 8 260.5 250 225.8 17.5 126 9 260.5 250 236.3 12 136.5 10 273 262.5 246.8 13 147 11 285.5

REC

Motion on RECL32-300 ML1C REA REC Pressure fluctuation Load fluctuation Speed fluctuation RHC 0.5 0.5 0.3 0.5 Pressure (MPa) Pressure (MPa) Pressure (MPa) Reducing actuation cycle time 10 10 30 10 Load (kg) Load (kg) Load (kg) MTS 100 300 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 CC Max. 500mm/s of high speed transfer is possible.

240

20 40 60 80 100 0 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph x Maximum Speed 300 mm/s or Less 10 Selection Example (Vertical Mounting) 1.

Series AP500

Body Poppet 316L SS Diaphragm 316L SS Nozzle Code S SHP SH 316L SS secondary remelt 316L SS Seat material Hastelloy C-22 Hastelloy C-22 Code Material PCTFE (Standard) PTFE 3) Hastelloy C-22 Hastelloy C-22 No code TF H 3) PTFE recommended for applications such as within a process tool.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

Flow Control Equipment

(mm) ASN 230 460 920 260 390 660 790 1580 1710 100 180 Air (l/min(ANR)) Controlled (Free) flow 3.5 7 14 4 6 10 12 24 26 1.5 2.7 Eff area (mm2) AQ Note) Supply pressure: 0.5MPa, Temperature: 20C. ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

4-channel Flow Monitor ( compatible)

min L/min L/min 0 to 0 to 0 to Accumulated flow display/ Set flow range 0 to 999,999,999 L 9,999,9 99.99 x 99,999, 999.9 L 0 to 999,999,999 L 99,999, 999.9 L 0 to 999,999,999 L 103 L Accumulated flow display/ Min. setting unit 1 L 10 L 0.1 L 1 L 0.1 L 1 L Accumulated pulse flow rate conversion value 0.1 0.5 1 2 5 L/pulse 0.05 L 0.1 L 0.5 L 1 L 2 L 0.05 L 0.1 L 0.5 L L/pulse L/pulse L/pulse

Clamp Cylinder with Lock Series CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

Air Cylinder MGQ Series Compact Guide Cylinder

I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

Sine Rodless Cylinder Series REBR Direct Mount Type

L Y59AL 5m .

CG5-S

Stainless Steel Cylinder Se ries CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order X165US TN CG5 L N 25 S R 100 Without Auto Switch X165US TN CDG5 L N 25 S 100 G5BAL R With Auto Switch Inch rod thread (Only available with "TN" port option. Currently only available on the 20 to 63mm bore sizes.)

Wedge Cam Operation Gripper Series MHK2

mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.

LFE-OMY0008

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

MHK2

(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHK2

(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Series IDG

min (ANR) (SCFM) Note 2) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

Vacuum Equipment

and switching valve to pad by piping system Q2 = S x 11.1 l/min (ANR) Q : Smaller one between the Q1 and Q2 l/min (ANR) S : Effective area of piping (mm 2) Adsorption flow (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Selection Procedure Tubing length (m) Air consumption From the point at which the valve's effective area of 18 mm 2 and the piping volume of 5 l intersect, the

C76

: C76RAY Without magnet, Built-in magnet Bore Stroke B S + Stroke ZZ + Stroke (mm) LD AM B C D EE G1 H K KK L LH LX N1 N2 NB NDh8 S SW WH XB ZZ 116 Bore 26 0 0.033 32 40 20 24 42.3 52.3 12 14 37.5 46.5 G1 /8 G1 /4 22 27 36 40 10 12 47 58.5 21 26 30 38 29 38 17 22 34.5 42.5 80 105 17 19 16 16 28 31 M10 x 1.5 9, 14 depth of counter bore 10 32 0 0.039 M12 x 1.75 11, 17.5 depth of counter bore