Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

50 (63) 38 (53) 5 3 38 (53) 32 (42) 1 23 (30) 1/8 14 port 10 30 (42) 30 (42) 3/8, 1/2, 3/4-2 port 3, 5 port 1/8 12 port 3/8, 1/2, 3/4-2 port 2, 4 port 3/8, 1/2, 3/4 1 port EVS7-8-FG-D-M0 EVS7-8-F G-D-M0 H J I 221.5 216.5 216.5 103 103 56 56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual

Prevents Micro-Bubbles

Symbol Thread type M5 Rc 1/8 NPT 1/8 Body class 2 3, 4, 5, 6 3, 4, 5, 6 LVH Nil N Variations LVD LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter LVQ Inch sizes 4 8 10 16 22 Tubing O.D. 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Metric 4, 6 6, 8, 10 10, 12 12, 19 19, 25 LQ Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Symbol Type LVN Basic type N.C.

Compact Slide Series MXH

4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

SFOD-OMT0005CN

No.SFOD-OMT0005CN-C EtherNet/IP (DC24V) / / JXC91 1 . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 (1) . 9 (2) . 9 (3) . 9 (4)PLC . 9 (5) . 9 (6) . 10 (7) . 10 (8) () . 11 (9) . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 (1)(JXC917-) . 14 (2)DIN (JXC918-) . 15 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 (IP ) . 18 4.2 . 19 TMEtherNet/IP TM . 20 4.3 RSLogix5000 4.4 EtherNet/

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up

Fieldbus system (PROFIBUS DP compliant)

No.1 No.2 No.3 Input point COM A COM B COM C COM D OFF OFF OFF 64 16 16 16 16 OFF OFF ON 0 OFF ON OFF 16 8 8 OFF ON ON 24 8 8 8 ON OFF OFF 32 8 8 8 8 ON OFF ON 48 16 16 16 ON ON OFF Reserve ON ON ON : It cannot be set to 0 simultaneously for input and output point. Output setting (Switch No.4 to 6) The setting at shipment is turned OFF, set to 64.

Fieldbus system PROFINET compatible SI Unit

to Section 5.1.2 and Table 4-3 16 Valves 2 bytes 2 / Valves Refer to Section 6.3 16 Valves shared 2 bytes 2 / Valves Refer to Section 6.3 and Table 4-3 32 Valves 4 bytes 2 / Valves Refer to Section 6.3 32 Valves shared 4 bytes 2 / Valves Refer to Section 6.3 and Table 4-3 EX245-DX1 2 bytes 3..10 / module 1..8 Refer to Section 7.4 EX245-DX1 shared 2 bytes 3..10 / module 1..8 Refer to Section

CG5-X6011

1/4 7/16-20 0.75 0.63 1.75 5.38 63 (2.50") 0.75 0.78 0.50 1/4 7/16-20 0.75 0.63 1.75 5.50 80 (3.25") 1.13 1.28 0.75 3/8 3/4-16 1.25 0.94 2.50 6.88 100 (4.00") 1.13 1.28 0.75 1/2 3/4-16 1.25 0.94 2.50 6.88 Double Rear Clevis Mounting Type CG5D (MP2 Mounting Style) 2-EE NPT LR MR KK CD XD + STROKE A CB UB BORE A CB CD EE KK LR MR UB XD 40 (1.50") 0.75 0.78 0.50 1/8 7/16-20 0.75 0.63 1.75 5.75

High performance type Step Motor Controller (Servo/24 VDC)

13 Actuator cable type A B-5 Red 7 A A-5 Black 6 Robot cable Nil B B-6 Orange 9 B A-6 Black 8 Standard cable S 3 Electric actuator side Controller side 14.2 (2) 1 2 (8) (1) (14) 18 A1 B1 17.7 5 6 (3) 1 2 A6 B6 L 15 16 30.7 11 2 Actuator cable [8 to 20 m] (1) (2) A B-1 Brown 2 A A-1 Red 1 UCable length (L) B B-2 Orange 6 B A-2 B-3 A-3 Yellow 5 8m*1) 8 Green 3 Blue 4 10m*1) A Shield (

Modular F.R.L. Unit

IN,OUT EXH. 11 (0.60) 10 (0.54) 1/8 SUP VHS20 1/8 16 (0.87) 1/4 14 (0.76) 14 (0.76) 1/4 16 (0.87) VHS30 1/4 OUT IN 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) VHS40 3/8 B 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) VHS40-06 3/4 1/2 49 (2.66) 77 (1.73) EXH. 3/4 50 (2.71) 82 (4.44) VHS50 1/2 1 53 (2.87) 125 (6.78) Note) Use an air filter on the IN side for operating protection.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

" " Y G C Note) 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 1 4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 Inch size Note) Polyurethane only.

Vacuum Manifold for fieldbus system

Port Size Operating pressure range [MPa] Metric Inch P(End plate U) 8 5/16 0.3 to 0.5 P(Ejector) Note 1) 2) 6 1/4 V 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 : Not applicable Note 1) P port (Ejector) is available when selecting for ejector model number. Note 2) P port (End plate U) and P port (Ejector) are connected inside.

HRX-OM-X037

*12 130 16 *12 180 16 *12 Maximum lifting height m 50 49 55 49 68 49 0.10 0.10 0.10 0.10 0.10 0.10 Settable pressure range 5 MPa to to to to to to 0.50 0.49 0.55 0.49 0.68 0.49 Circulating fluid system Minimum operating flow rate 6 L/min 20 2 25 2 40 2 Tank capacity14 L 42 7 42 7 60 7 By-pass (With valve) built-in Electric conductivity setting range S/ cm 0.5 to 45 9 0.5 to 45 0.5 to 45

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) 2 (A) 2 2(A) 2(A) 3(R) (P)1 3(R) (P)1 i i 3 (R) 1 (P) 3 (R) 1 (P) u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Description Note White White White Note Part no.

Fieldbus system EtherCAT compatible SI Unit

(Only for Normal mode) Settings2 Content IO-Link master size setting (Process data size at each communication port) 1 2 22 bytes (default setting) OFF OFF (4/4/4/4 bytes) OFF ON 38 bytes (8/8/8/8 bytes) Port1/2/3/4 (Input and Output) ON OFF 70 bytes (16/16/16/16 bytes) ON ON 134 bytes (32/32/32/32 bytes) EX600-SEC1/2 Compatibility mode setting: Settings2 Content 3 OFF Run in Normal mode.

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Air Cylinder Series MB

D-J5 D-F5 W D-J59W D-F5BAL D-F59F 110 115 120 95 90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 130 + 55 90 + 55 95 + 55 n = 4,8,12,16... n (same side) n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... 1 90 110 115 120 95 130 140 120 125 130 2 (different side or same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130