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(ANR)) Type S 22 38 54 62 84 ZA Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 185 150 ZX Maximum vacuum pressure L: -53 kPa S: -84 kPa ZR Built-in silencer, Manifold exhaust Individual exhaust port Exhaust release (Ejector exhaust) ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment ZMA N.C./N.O.

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Mounting Warning Mounting 1.

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 4 x M6 x 1 thread depth 15 (Mounting thread) 6 159 6 62 174 2 x M6 x 1 thread depth 6 (Mounting thread) 33 144 E 13 25 25 30 41 MHZ E 4 x 5.2 through (Mounting hole) 0 0.1 32 MHF 46 1.2 46 1.2 M5 x 0.8 M5 x 0.8 4 x 10 Finger opening port Finger closing port Close: 0 +0.1 0 MHL E-E Open: 801 MHR 8 x M4 x 0.7 thread depth 4 MHK 128 (Attachment

DIN rail center 70 (94.4) 100 70 (94.4) 100 90 10 SUP 40 (4.5) 30 Adjusting knob Electrical entry Applicable O.D. 6.5 to 8.5 12 Electrical entry Applicable O.D. 6.5 to 8.5 Bracket Gauge 35 42 8-4.5 Gauge 34 42 4-4.5 42 9-M3 OUT1 OUT2 OUT3 Bracket OUT5 OUT4 EXH port EXH port Station 1 n 69.3(MAX74.4) 69.3(MAX.74.4) 60 OUT 60 19.5 2.1 OUT OUT OUT OUT OUT OUT GND OUT6 19.5 2.1 VCC Detection

DIN rail center 70 (94.4) 100 70 (94.4) 100 90 10 SUP 40 (4.5) 30 Adjusting knob Electrical entry Applicable O.D. 6.5 to 8.5 12 Electrical entry Applicable O.D. 6.5 to 8.5 Bracket Gauge 35 42 8-4.5 Gauge 34 42 4-4.5 42 9-M3 OUT1 OUT2 OUT3 Bracket OUT5 OUT4 EXH port EXH port Station 1 n 69.3(MAX74.4) 69.3(MAX.74.4) 60 OUT 60 19.5 2.1 OUT OUT OUT OUT OUT OUT GND OUT6 19.5 2.1 VCC Detection

Note 3) For piping, refer to Specific Product Precautions. 882 Hygienic Design Cylinder Series HY Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height HYB D-H7BA 16 16 SMC SMC SMC SMC Hs B 29 A B Hs 29 A 20, 25 32 to 63 D-G5BA 24.5 A 33 B Hs 80, 100 (mm) D-H7BA D-G5BA A Bore size B Hs A B Hs 20 25 32 40 50 63 80 100 29 29 30 34.5 42 42 19.5 19.5 20.5 22.5

Return to origin . 41 8.1 Return to origin . 41 8.2 Positioning operation . 41 8.3 Pushing operation. 42 (1) Pushing operation is successfully performed. . 42 (2) Pushing operation is failed (pushing the air) . 42 (3) Movement of the work piece after the completion of the pushing process .. 42 8.4 Controller input signal response time . 43 8.5 Methods of interrupting operation . 43 9.

Holes #8-32 UNC THD x .23 (5.8) DEEP . .30 (7.6) 2 PLACES AS SHOWN. .20 (5.1) .30 (7.6) ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION * 3-Way Normally Closed Piped Exhaust 42 SOLENOID VALVES . . . Table A LW 2.5 Watts MAXIMUM OPERATING PRESSURE DIFFERENTIAL MODEL TYPE FLOW CONFIGURATION VALVE SUFFIX NO.

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

9 174 140 45 38 36 22 28 17 38 M33 x 2 40 3/4 94 159 12 43 36 (mm) Bore size (mm) Z ZZ TT TX TY TZ V W 40 123 246 24 70 65 95 7.5 8 50 131 262 26 83 78 108 10 9 63 140 280 26 90 86 115 12 10 80 156 312 36 112 106 162 16 13 100 170 340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 111 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double

SYJ300/500/700 Preferred Option Summary Option Light and surge voltage suppressor Series Type of actuation Voltages Electrical entry Manual override Manifolds L type plug connector SYJ300 Type 42 N.C. N.O.

Note 2) Check SpeedWork Load Graph (Guide) on page 42 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation.

Mass (g) DVane type Single vane Double vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-D CRB2BW10-S Model 90 180 180 90 100 90 270 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 400 446 387 365 25.7 49 376 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

MTS Smaller and lightweight MY CY Dimensions/Weight Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length MG Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Table 9-6 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) 9.8 Compliance HRS Series 9-16 HRX-OM-M090 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

Table 9-5 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series Documents 9-9 HRX-OM-O021 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

Table 9-5 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series 9.8 Compliance 9-9 HRX-OM-R005 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

Electric actuators / Slider type Common precautions . 39 6.1 Design and selection . 39 6.2 Handling . 39 6.3 Mounting . 40 6.4 Precaution on maintenance . 40 6.5 How to detach and attach the dust seal band . 42 6.6 Replacement of belt . 43 7.