Industrial Filters

) Weight (kg) 10 13 18 10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

Vacuum Ejector Series ZM

20 20 ZMA Suction flow rate 10 10 10 ZQ Flow characteristics are expressed in ejector vacuum pressure and suction flow.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Clean Air Module

: Analog output 1 to 5 V Allowable load resistance 100 k or more P5: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

12 10 16 10 Vacuum suction type M3 x 0.5 11221122185 (180) 24 25 14 22 8 15 Double acting Non-lube 11221122400 (390) 780 (760) MHR2-20 MDHR2-20 MHR2-30 MDHR2-30 33 34 16 28 12 20 M5 x 0.8 1122112230 58 59 19 37 18 Note 1) Refer to the Best Pneumatics No. 4 for details of gripping force at each gripping point.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

5 6 27.8 29 32 37.5 27 34 37 50 28.5 30.5 33.5 37.5 20H9 28H9 32H9 35H9 35h9 40h9 48h9 54h9 17 19 24 28 20 22 22 24 6.8 8.6 8.6 10.5 11 14 14 18 6.5 8.5 8.5 10.5 12 14 14 19 34.5 46 50 63 60 76 84 100 4.5 6 6.5 10 46h9 61h9 67h9 77h9 4 6 4.5 5 20 27.5 29 38 9.5 12 12 15.5 45h9 60h9 65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q

Digital Flow Switch (Remote type sensor unit)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0010-J Dimensions PF3W504

Compact Rotary Actuator

Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 12. Output operation of the solid state auto switch is not stable for 50 [ms] after powered ON.

Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

Speed Controller: Standard Type Series AS In-line Type

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Unit 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 2 Analog input range Sets the analogue input device range. Selects the analog input range. -10..10 V Channel 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC. 3 Analog data format Unit Sign & Magnitude Signed binary. 2s complement 2s complement.

ITV

How to Order ITV 209 0 0 1 2 5 S Pressure display units Pressure range 5 kPa 9 1.3 to 80kPa Power supply voltage Cable connector type S L Straight type 3m Right angle type 3m Without cable connector 0 1 24V DC 12 to15V DC N Option Input signal Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Without bracket Flat bracket L-bracket B Current type 0 to 20 mA DC Monitor output Thread type Port

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGR08-12 47 6 12 d 10 KPQR10-12 KPGR10-12 18.5 23 41 29 49.5 24.7 9 Note 1) D indicates the maximum diameter.

c

Fittings: Fluoropolymer fittings LQ1, LQ2, LQ3 Fluid Note 1) 2) 3) and applicable fittings Note 1) 2) 3) Max. operating pressure (MPa) Refer to the max. operating pressure curve. 20 12 10 6 25 20 35 20 60 30 95 60 220 160 400 290 500 360 Max. operating temperature Material Recommended radius Refraction value Min. bending radius (mm) Note 4) 260oC PFA (Tetrafluoroethylene perfluoroalkoxy vinyl

Refrigerated Air Dryer

, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

ZP

Model Size C10 A 10 ZP10C B 12 C 4 D 13 E F Y 1.7 12 12 12.5 14 14 14.5 18.5 19.5 3.8 7.7 7.7 8.2 9.5 9.5 10 13.7 14.7 ZP10U to 50U C13 13 ZP13C 15 4 13 1.8 C16 16 ZP16C 18 4 13 1.2 C20 20 ZP20C 23 4 15 1.7 C25 25 ZP25C 28 4 15 1.8 C32 32 ZP32C 35 4 15 2.3 C40 40 ZP40C 43 7 18 3.3 C50 50 ZP50C 53 7 18 Deep (D) ZP10D to 40D Model Size U02 A ZP02U B 2.6 C 1.2 D E F Y 2 4 6 8 10 13 16 20 25

ZL3-OM00601

Wiring 12 4. Solenoid Valve 13 5. Vacuum Pressure Switch 14 6. Vaccum release flow adjusting needle 15 7. Structural Drawing and Replacement of Parts 16 8. Maintenaunce 20 9. Specifications 21 10. Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3.