Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Compact Manifold Regulator

PBT Material 30 40 0.5 g Weight 30 6.5 (R) 2 4.5 1 16 4 11 745 ARM10F Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

LECP6_C

PLC No. 1-051 PLC 15ms 30ms 2(P.40) No.

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

VP4

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5

IDX-OM-M051

Connect the piping so that the inlet temperature of the facility water will be lower than 40 oC. To prevent foreign matter such as dust from getting in the facility water to the equipment, flush the piping before connecting. Dust or oil in the piping can cause cooling failure or other failures of the equipment. Connect the attached Y-shaped strainer to the facility water inlet.

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

Series 10-, 21- AF-A Air Filter

53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

LECA6_C

(OUT0OUT5 ) USY ON () INP ONBUSY OFF -No No 24V 0V ON OFF IN05 SVON No Min15ms DRIVE ON OFF OUT05 BUSY SVRE SETON INP 0mm/s INP ONOFF INP ONOFF 40 - (3) --No.(IN0IN5) DRIVE ON(OUT OFF) No.(IN0IN5 ) DRIVE OFF No.

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

IDX-OM-Z004

L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm M3 6.5mm 1.25mm 2 2 1.3 IDF100150F-W 1 6 IDX-OM-Z004 2 2 2.1 45 45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004 2 2.2 2.2.1 (1) (85%) () C 245050 () 2000m ) (2) IDF100150F-W 2.2 2 2 IDX-OM-Z004 2 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 600mm 600mm 600mm 600mm 600mm 1 2 IDF100150F-W 2.2 2 3 IDX-OM-Z004 2 2.2.3 60 60 IN OUT 2.2.4 40

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

Steam Valve

Symbol Graph (1) VND 02 D Pilot Pressure (N.O. type) Valve type Valve size N.C. N.O.

CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

SFOD-OMT0005CN

DRIVE ON )No.3 1 OUT1 OUT5 OUT 4 OUT 3 OUT 2 OUT 1 OUT 0 2 OUT2 OFF OFF OFF OFF ON ON 3 OUT3 4 OUT4 (1)RESET ON OFF (2) (3) () OFF 0 5 OUT5 6 7 ON 8 BUSY () BUSY OFF 9 SVRE OFF OFFON ON 10 SETON SETON()ON OFF -33- Word Bit INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON )100 80% 40%(*1) *1 11 INP 0 () INP [ON] 100 80 40 12 AREA 12 ON 13 WAREA W1 W2 ON 14 ESTOP ON