ZX

(For replacement) Individual spacer R1 ZF Phillips screw Adapter D (M2.5 x 28) Phillips screw M2.5 x 12 M2.5 x 12 Phillips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) ZP Note 1) M5: Suffix -4, M6: Suffix -1 Note 2) M5: Suffix -1, M6: Suffix -2 Adapter D Note 1) ZCU Individual spacer R1 AMJ Adapter D individual spacer R1 assembly Assembly no.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

Air Slide Table Series MXW

16 20 D-A9 D-A9V 10 6 6 8.5 10 D-M9 D-M9V D-M9W D-M9WV 3.5 3.5 5 6 5.5 MXH Interference MXU Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately 30% dispersion).

Cylinder with Turntable Series MGT

/M9WV 1 pc. 5 7.5 11.5 8.5 12 7.5 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 11.5 9.5 8 10 2 pcs. 10 Hysteresis specifications are given as a guide, it is not a guaranteed range.

mb1

32 40 50 63 80 100 2 (Different sides, Same side) D-Z7/Z80 Reed switch 15 25 10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 6 D-Y7BAL 5 5 5 5 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not

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-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 50 63 80 100 No. of auto switches mounted Type Auto switch model Auto switch model 32 40 50 63 80 100 2 (Different sides, Same side) D-Z7/Z80 Reed switch 15 25 10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV

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PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Port size Assembly No. 12 One-touch fitting SY7000-55-1B 12 One-touch fitting SY7000-54-1C [When using 2 different supply pressures] Indicate the individual SUP block assembly arrangement on a manifold specification sheet. (For SS5Y-60-D, the blocking disk is attached on the D side.)

Rotary Actuator/Vane Style Series CRB2

type auto switches are used: D-R73/R80/T79 D(mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 24 1 Y Model CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 30 1 M3 x 0.5 M5 x 0.8 M5 x 0.8 5 6 8 12 14 16 34 42 50 20 29 40 29 30 31 18 20 22 4 4.5 5 10 10 12 0.5 0.5 1 15 20 30 25 25 25 29 36 43 18.5 25 25 M3 x 0.5 depth 5 M4 x 0.7 depth 7 25.5 3 34.5 3 M5 x 0.8 depth 10 61 Series CDRB2BW Dimensions: 40

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS-FG AS-FG AS301FSG, AS311FSG AS401FSG, AS411FSG AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

D side U side See page 2-4-91 for cylinder port fittings.

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

1

Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming

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Dimensions and the most sensitive positions are same as the conventional types. s D-M9N (s-vvire, NPN output) M-F9N -^ D-W9P *8 c-"*t"*r D-FQB 17 D-MgN D-MgP Nwtypes D-MgB nil;'Y,r dCl D-MgP (3-wke, PNP output) D-MgB (2-wire) Range of load 5 t o wire:4 timesrn" New types tr{lur$ D-FgB 5 to 40mA D.M9B 2.5 to 40mn lead wire is available as siandard. 41ime6 more bl f e x b e Indicator Light:

SMC Wireless System EtherNet/IP ® compatible

11 Reserved Remote (Wireless channel 001) byte 12 DX#D (Unit 2) byte 13 byte 14 Reserved byte 15 Reserved byte 16 DX#D (Unit 1) byte 17 Remote (Wireless channel 002) byte 18 DX#B (Unit 2) byte 19 Reserved Total 20 byte 12 byte -51No.EX-OMU0028-D Diagnostic allocation: Detailed Input data Output data Module name Unit name Module name Unit name DY#B (Unit 0) byte 0 System diagnosis 1 byte

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V IC circuit 12 V 5 V 12 V 12 V Relay, PLC 24 V Yes Grommet Diagnostic indication 2-color display Grommet IC circuit A96 A93 A90 12 V 5 V 3-wire (NPN equiv.)