OMU0023

the Return to Origin operation sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) Made to Order Made to Order (For details, refer to page 411.)

VFA3000

0.32{0.28} 0.27 0.32 0.32 0.32 0.37 0.76{0.62} 0.59 0.75 0.75 0.75 0.47 Base mounted (2) Body ported 0.42{0.44} 0.36 0.36 0.36 0.45 0.42 0.83{0.39} 1.0 1.0 1.0 0.68 0.82 VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 0.36{0.29} 0.32 0.18 0.18 0.26 0.79{0.66} 0.64 0.57 0.57 0.41 1 8 0.37{0.50} 0.14 0.14 0.22 0.21 1.4{0.40} 0.64 0.64 0.49 0.53 VFA3140-02 2 1 4 3 VFA3440-02-X1 5 0.23{0.26}

0.4

P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket N Name plate Note

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS

HEC-OM-S008

. 5-5 5.6 Function codes . 5-7 5.7 LRC . 5-7 5.8 Explanation of function codes . 5-8 5.9 Negative response . 5-12 5.10 Register Map . 5-13 5.11 Communication Format and Examples of Answers from Thermo-con . 5-16 6 Troubleshooting . 6-1 Preparation for Communication 1 Preparation for Communication Make preparation for using communication facility as follows. 1) Turn off the power switch

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

4/5 Port Air Operated Valve Series SYJA3000

43 (5 Port/Base mounted) How to Order SS5YJ5 43 05 C4 Stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 A, B port C4 20 stations Nil F N T Rc G NPT NPTF P port 1/8 A, B port size C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" 1-5-39 5 Port Solenoid Valve Rubber Seal Series SYJ5000 Mix Installation of the SYJ500 and the SYJ5000 Valves on the Same Manifold

5 Port Solenoid Valve SY Series

How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 01 1 8 SY5000 SY7000 02 02 03 1 4 Coil specifications Type of actuation 1 4 Standard Nil SY9000 2 position single 3 8 T With power saving circuit (24, 12 VDC only

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R)

ZP

4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5 5 7 1.8 2.5 ZCU 14.5 16.5 5 7

3 Port Air Operated Valve Series SYJA300

bracket F Nil Without bracket SYJA 2 5 1 M5 Body ported Thread type Nil Rc G NPT NPTF SYJA 4 5 1 F N T Base mounted Port size Series Type of actuation Symbol Without sub-plate Nil Bore size Applicable series SYJA700 SYJA500 7 5 Normally open Normally closed 2 1 1/8 with sub-plate 01 SYJA500 SYJA700 1/4 with sub-plate SYJA700 02 How to Order Manifold Base Same manifolds as series SYJ500/700

IR1000/2000/3000

AL 14-5-21