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) When more than one specLiicalbn s reqLr red indicare in ascending nlmericallhen alphabet cal order Not 2) Drain gu de rs G1/4 (app icable ro AFD30 and 40) Note 1) Wrlholri a vare flncton Note 2) For NPT ihread lype Port size Accessories Synbol Poat sEe 20 30 40 Symbol Description Applicaue mooe|s 1t8 a a o a 3/8 a a 112 a With brackel AFD2010 40 Floal lype aulo drain (N C ) AFD20 to 40

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Guide Table Series MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

Guide Table Series MGF ø40, ø63, ø100 1

MGF100 MGF100 100 100 CX MGF63 30 MGF63 MGF63 20 50 40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

SMC Electronic Switch Series Variations

Example: The figure below is based on the condition of set values as P1 = 40[kPa] and P2 = 20[kPa].

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock

SFOD-OMT0009CN

AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

LEC-OM069xx

Specifications of Built-in Resistor Regenerative Power Processed Applicable DRIVER Minimum Allowable LECYM2Resistance [] Resistance [] Capacity [W] by Built-in Resistor [W] * V5, V7, V8 40 Three-phase 200 V V9 50 40 8 40 *1: The average regenerative power that can be handled is 20% of the rated capacity of the regenerative resistor built into the DRIVER. 3-29 3 Wiring and Connection 3.7.1

DOC1023125

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQFS25 EQFS32 EQFS40 Stroke[mm] Note1) 50 to 800 50 to 1000 150 to 1200 Horizontal 15 26 40 40 39.5 50 68 68 26 60 75 80 Work load [kg] Note.2) Vertical 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 to 400 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to

CNS

144 144 20 40 90 63 43 14 215 35 35 Up to 1200 Bore size (mm) N GR J K KA L M MA MM P Q R RR S T U V VA H Z ZZ 125 140 160 87.5 85.5 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 25 29 303 35 20 23 110 478 507 95 93.5 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 25 32 343 40 20 28 110 528 560 109 104 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36 x 1.5 39 3/4 25 36 396 45 25 35 120

5 Port Air Operated Valve

20 stations P, R Port size 1/8 1/4 3/8 1/2 VFA1000 VFA3000 VFA5000 Symbol Up to 10 stations for VV5FA5-20, and up to 15 stations for VV5FA5-21. 30 20 21 The A and B ports are made on the top.

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

SFOD-OMT0010

AWG size AWG28 3 3m 5 5m Controller side PLC side Ground cable (green), round terminal R1.25-4 (For M4 screw) 40 20 39 . . . 2 21 1 (7.5) L The separate lines of the terminal on the PLC side are fusion together with an adhesive tape with a pitch of 1.27mm.

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

Model Selection 1

25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

JCRB-OM00003

Mount the parallel key (For size 40). 20 With Auto Switch 90, 180 (For CDRB20, 30, 40) B For CDRB20, 30, 40-90 1. Remove the parallel key. (For size 40.) 2. Remove the cross recessed round head screw (18). 3. Remove the cover (14) and magnet holder (15). 4. Remove the hexagon socket head cap screw (19). 5.

70pvpump

40 VDW Air consumption 100 l/min (ANR) Air consumption 200 l/min (ANR) 30 30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3