XLG Series

Magnet (option) External seal (maintenance part) Heater (option) Pilot port (Pressurized / Totally closed) Axial seal (material : FKM) Scraper (Material : FKM) Valve (material : SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171

High Vacuum L Type Valve

108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

70pvpump

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 17-5-163 24 Series PB Performance Curves: Built-in Solenoid Valve Type/Air Operated Type Cycle 1 Hz Cycle 5 Hz Cycle 10 Hz 70 70 70 60 60 60 Total lifting range (m) Total lifting range (m) Total lifting range (m) 50 50 50 40 40 40 SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.7 MPa

Compact Vacuum Unit

/ZB041 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) 0.53 14.5 14.5 (15) (100) (100) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 0.42 11.6 11.6 (12) (80) (80) Air consumption Vacuum pressure 0.32 8.7 8.7 (9) (60) (60) 0.21 5.8 5.8 (6) (40) (40) 0.11 2.9 2.9 (3) (20) (20) Suction flow 0 0 0 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

IDX-OM-W010

Specification for Option S 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Power supply connection procedure . 13 2 13 4 Electric circuit . 13 2 Chapter 14 Specification for Option T 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 Remote operation . 14 1 14 4 How to connect the power and signal cable . 14 2 14 5 How to re-start the operation . 14 2 14 6 Electric

High Vacuum L Type Valve

Not adhering to these specifications, can result in damage to the product. 13 XL-OMV0016 7-2.

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 6 Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQ2S.

Ejector Valve Unit Series ZYY/ZYX

-40 Air consumption -40 40 -40 40 Suction flow rate Suction flow rate -20 20 -20 -20 20 -20 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 10 20 30 40 50 5 10 15 20 25 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship

Compact Guide Cylinder

Add -XB10 to the end of standard model number. 12, 16 1 to 249 12, 16 11 to 249 Applicable stroke 20, 25, 32 1 to 399 20, 25, 32 21 to 399 mm) 40 to 100 5 to 395 40 to 100 26 to 395 Part no.: MGQM20-39 Part no.: MGQM20-39-XB10 A spacer 1 mm in width is installed in the MGQM20-40. Special body manufactured for 39 stroke. Example C dimension is 77 mm. C dimension is 76 mm. 6.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Lubricator Series AL10 to 60

53 70 70 90 95 G 27 40 54 54 66 66 E 47 47 C 26 36 38 40 38 41 45 H 22 23 26 25 35 35 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level

New

40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 Bracket mounting a b f g h i Port size P Model j 37 41 46 48 a1 Note) d e 2.3 2.3 2.3 2.3 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 56 56 70.5 70.5 52 60 68 73 75 75 92 92 30 34.5 39 41 6.5 6.5 6.5

Modular Type Lubricator Series AL

54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification

10

Mounting bolt X T MM L H D B RB08-X331 RB10-X331 RB14-X331 RB20-X331 RB27-X331 15 4.5 drill, 8 counterbore depth 4.4 32 M8 x 1.0 10 20 M4 7.5 5.5 drill, 9.5 counterbore depth 5.4 19 40 M10 x 1.0 12 25 M5 9.5 9 drill, 14 counterbore depth 8.6 25 54 M14 x 1.5 16 34 M8 12.5 11 drill, 17.5 counterbore depth 10.8 38 70 M20 x 1.5 22 44 M10 19 13.5 drill, 20 counterbore depth 13 50 80 M27 x 1.5

Plug-in Unit

A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL. B (+) () () (+) 14 14 Connector Manufacturers Example: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL.

Vacuum Pad

A B D Weight [g] ZP3P-T25PTSFK10-B5 33 69 23 28.5 ZP3P-T25PTSFK20-B5 43 107 51 42.2 ZP3P-T35PTSFJM-B01 ZP3P-T35PTSFKM-B01 ZP3P-T35PTSFJ10-B01 ZP3P-T35PTSFK10-B01 ZP3P-T35PTSFK20-B01 ZP3P-T35PTSFJ20-B01 Width across flats 13 Rc1/8 Width across flats 13 Width across flats 13 Rc1/8 Width across flats 13 K: Non-rotating D-D J: Rotating D-D B B Width across flats 19 Width across flats 19 D D D

VCA

48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09