Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

KJS04-M3 KJL04-M3 Refer to Construction. (page 853) Symbol 0 2 5 Without fitting (M3 x 0.5) 4 (Straight) 4 (Elbow) Without supply Note) adapter (For manifold) Pilot valve (Refer to Table (1).) M Standard (1 W for DC) Note) Nil Y DC low wattage type (0.5 W) Note) Note) O-ring and round head combination screws (M2 x 12) are attached to the supply adapter (M).

SI unit for DeviceNet ®

(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 Switches for setting of node address and operating mode. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

AMH

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

Air Cylinder NCA1 Series

-12 3 3.125 1/2 1 1/2 3 7/16 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 14 3 1/2 2 1/2-12 3 1/2

NCA1

12 3 3.125 1/2 1 1/2 3 7/16 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25

LEF-OM007xx

LEFS25S LEFS32S LEFS32 Speed 500mm/sec 0 [/min] LEFS40 Speed 500mm/sec 0 [/min] 10,000,000 20 [/min] 20 [/min] 10,000,000 30 [/min] 40 [/min] ISO4 50 [/min] ISO CLASS4 ISO5 ISO CLASS5 ISO6 1,000,000 ISO CLASS6 1,000,000 Particle concentration [particles/m3] Particle concentration [particles/m3] 100,000 100,000 10,000 10,000 1,000 1,000 100 100 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

Electric Actuator/Slider Type

Note 12) For an actuator with lock, add the power consumption for the lock.

Fieldbus System

B 12 B 12 B 12 12 B 5.5 22.8 5.4 8.8 3.9 (6) SI Unit 86.6 (9.3) (17.9) 4 x M5 Mounting hole (A, B port: 12) Connector for Handheld Terminal Digital Output Unit End plate (Fitting for the type with P/E ports on the U and/or D sides) Digital Input Unit One-touch fitting [4(A), 2(B) port] Input connector Output connector Applicable tube O.D.: 6, 1/4" : 8, 5/16" : 10, 3/8" : 12 (Station 1) (

C76

+0.036 0 10 +0.043 0 12 30 0 0.033 M30 x 1.5 G 1/8 30 58 23.8 10 M8 x 1 9 32 40 12.2 M10 x 1.5 38 0 0.039 M38 x 1.5 G 1/4 35 69 28.3 12 M10 x 1 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12

C76

: (800) 258-9200-www.stevenengineering.com MB (mm) (mm) MB1 a 20 24 j 12 15 c 20 24 g 18 23 f 10 12 d 40 48 b 10 12 Thread e M10 x 1.5 M12 x 1.75 0 l3 14 16 Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32 40 dH71 10 12 10.5 12 13 13 CA2 CS1 C76 C85 Floating joint/Series JA JA25/40 C95 CP95 NCM NCA

VQ4000

44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15

LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

VQ5000

12 stations F 1 to 12 Manifold is 12 stations max.

Fieldbus System

A 14 A B A 14 A B A B A 14 A B A 14 A B 2 3 A 14 U side D side PWR OUT 0 1 4 5 Mounting 2 3 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT Nil D D0 D3 Direct mounting DIN rail mounting (With DIN rail) DIN rail mounting (Without DIN rail) 8 7 1 2 3 4 5 Valve stations I/O Unit stations 1 2 For 3 stations Specify a longer rail than the standard length.

Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33

AC Servo Motor Driver (CC-Link Type ）

OPTIONS AND AUXILIARY EQUIPMENT (4) Outline dimension drawings (a) LEC-MR-RB-032 LEC-MR-RB-12 [Unit: mm (in)] TE1 Terminal block G3 G4 6 mounting hole LA Approx. 6 P C LB Approx. 12 Terminal screw: M3 MR-RB Tightening torque: 0.5 to 0.6 [N m] (4 to 5 [lb in]) Stripped length: 7 [mm] Mounting screw 168 144 12 6 156 5 Screw size: M5 Tightening torque: 3.24 [N m] G3 G4 TE1 (28.7 [lb in]) P C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 12) For the manufacture of intermediate strokes, please contact SMC.

VQ5000

Maximum stations are 12.

Fieldbus System

(L5) DIN rail holding screw (For DIN rail mounting) L1 EX260 SY SV VQC S0700 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B) port side:Yellow Silencer (exhaust port) (Built-in silencer specification) Light/surge voltage suppressor 8 DIN rail 5.5 35 5.5 B A B A B A A 14 A B A 14 A B 14 A 14 A 14 A (114.8) 113.4 97.5 101 1.4 81.2 61.7 B 12 B 12 B 12 B 12 B 12 10.9 4.7 (5.9