VZM500

Panel mounting hole Roller plunger VZM550-01-06 VZM550-01-06S 12 (Polyacetal or hard steel roller) Hexagon nut thick 8, across flats 22 JIS Symbol (Pilot exhaust port) 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F. 2.0 mm O.T. 2-3.2 mounting hole 3.5 mm T.T. Panel mounting hole Toggle lever VZM550-01-08 T.T.

Smooth Vent Valve

0.2MPa~10 Pa 0.4~0.7MPa 5~60C IN 11 MADE IN JAPAN 32 32 60 2 x M5 x 0.8, thread depth 5 18 18 524 Smooth Vent Valve XVD Series Construction/Operation Main air supply scale plate !

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth

Please contact us for the latest version.sales@ocaire.com, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .52800 lb

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 18 Stations

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 18 Stations, A B Port Size: -, P R Port Thread: -

Fieldbus system Ethernet POWERLINK compatible SI unit

Settings2 Node ID IP address 1 2 3 4 5 6 7 8 ON OFF OFF OFF OFF OFF OFF OFF 1 192.168.100.1 OFF ON OFF OFF OFF OFF OFF OFF 2 192.168.100.2 ON ON OFF OFF OFF OFF OFF OFF 3 192.168.100.3 : : : : : : : : : : ON OFF ON ON OFF ON ON ON 237 192.168.100.237 OFF ON ON ON OFF ON ON ON 238 192.168.100.238 ON ON ON ON OFF ON ON ON 239 192.168.100.239 18 EX## OMS1015-A LED Display The status display

EXxx-OML0010CN

[4.Parameter Setting] Waring 1. 3. 4. 1. 34 2. 34 3. 35 4. 41 -33No.EX-OML0010CN-C 1. a) b) c) d) 2.

Sensor Monitor

(Refer to page 41 for details.) -40No.PS-OMW0014-B Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

Digital Flow Switch

When window comparator mode is selected: Refer to page 41. When accumulated output mode is selected: Refer to page 42. When accumulated pulse output mode is selected: Refer to page 43. -39No.PF-OMO0005-F a. When hysteresis mode is selected Set value [P_2] or [n_2] and [the current set value] are displayed in turn. Press the or button to change the set value. Press the button to set.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

Digital Flow Monitor

(page 36 and 41) -43No.PF-OMU0007-D [F 5] FUNC terminal function setting Analogue output, external input or copy function can be selected. : Do not connect the grey wire when changing the setting. When the analogue output is selected When the product with analogue voltage output is used, the output of 1 to 5 V or 0 to 10 V can be selected.

PF3W7x.eng

which, if not avoided, will result in death or serious injury. 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) 1/2 23.9 mm Main screen (2-colour display) 3/4 29.9 mm UP button [ H_1] Hysteresis (OUT1) IO-Link status indicator light Operator 1 41

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

PF3W7x-X445.eng

Set value Sets the ON or OFF point of the switch output. 50% of rated flow 1 L+ Brown 18 to 30 VDC SET button Hysteresis Setting of hysteresis can prevent chattering. 5% of rated flow 2 N.C.

XL-OMY0001

/ AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

High Vacuum L Type Valve

Perform final torqueing of the bolts in the same numerical order (diagonally). 18 XL-OMV0007 7-4. Heater Replacement Procedure Step 1 Assembly of heater Heat transfer sheet Heater Heater Body Mounting screw Body Heater cover Mounting screw Heater cover Size 25 Size 40 or larger Put heat transfer sheet(Note1), heater, heater cover to backside of body.

XLA Series

Period and scope of warranty The guaranteed period covers the period which finishes the earliest among 2 million operating cycles (for size 16 to 80) or 1 million operating cycles (for size 100 and 160) [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XLA- ∗ -F7NJ ∗ - ∗ Series

Period and scope of warranty The guaranteed period covers the period which finishes the earliest among 2 million operating cycles (for size 16 to 80) or 1 million operating cycles (for size 100 and 160) [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XL-OMV0002

63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy