Lubricator

How to Replace the Components] (P21-30and [11. Disassembly Drawing] (P31-32). Note 1) Assembly of 2 types of bracket and 2 set screws. Note 2) Replacement part Part No. No.

Line filter

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11. Exploded Drawing 30 12.

Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Micro Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AMD20) 23 to 24 2) Bowl assembly (AMD20) 25 1) Element assembly (AMD30/AM40) 26 to 27 2) Bowl assembly (AMD30/AM40) 28 to 29 11. Exploded Drawing 30 12.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

Digital Pressure Switch ( compatible)

(Refer to page 41 for details.) -40No.PS-OMX0002-A Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.

NAAMS Standards Compliant

RR W XB XC Y Without switch cover With switch cover 50 45 45 5 40 46 88 20 20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11

S Couplers

R 3/8 32.9 32.9 39.4 KKA4P-02M 17 R 1/4 28.3 36.2 42.2 -03M 1/4 R 3/8 18.9 6.9 26.4 36.6 36.7 43.2 T A -04M 22 R 1/2 65.9 38.2 46.2 KKA6P-03M R 3/8 60.3 40.6 47.1 24 -04M 1/2 R 1/2 20.4 10.0 54.2 69.2 39.9 47.9 -06M 30 R 3/4 119.0 40.4 49.9 KKA7P-04M R 1/2 173.9 58.1 66.3 32 -06M 3/4 R 3/4 27.6 13.5 99.6 209.6 59.9 69.4 L2 H -10M 36 R 1 275.0 59.5 69.9 L1 KKA8P-06M R 3/4 362.8 73.4 82.9 41

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

CEx-OMB0060

A-phase pulse A-phase pulse B-phase pulse B-phase pulse Count 11 12 11 10 10 Multiplier Multiplier 1 Multiplier Multiplier Multiplier 1 : Use quadrature input signals for a bi-directional count.

HRX-OM-R039

Check of the accumulated operation time 11. Press the [SEL] key once. The accumulated operation time is displayed on the digital display. PV SV Displays the accumulated operation time. Refer to Table 5.4-2 for the display.

2-Color Display Digital Flow Switch Series PFM

DC () IN Pin no. 1 2 3 4 1 to 5 V or 4 to 20 mA With bracket A 30 20 46 4.2 10 PFM 15 PFMV 40 31.5 26.5 7.2 PF2A 1.6 22 PF2W 35 41 PF2D View A Bracket IF With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 11 34.5 24 7 Panel thickness dimension: 0.5 to 6 Panel mount adapter + Front protective cover 8.75 Panel mount adapter 937 Series PFM3 Dimensions Panel

SI Unit for Vacuum Manifold

Wiring 11 2.1. Fieldbus interface connector 11 2.2. Power supply connector 13 2.3. FE terminal 14 3. Configuration 15 3.1. GSD file and symbol file 15 3.2. Head modules 15 3.3. Modules 16 3.4. Sub modules 17 3.5. Configuration steps 18 4. Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1. Process data on Vacuum / Release module 23 5.2.

Activated Carbon Filter

Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

id_idw_and_ida_series_air_dyers

11 11 11 11 11 11 11 Optional dew points . 100F (70C) Standard pressure dew point . 40F (40C) Maximum inlet temperature . 122F (50C) Minimum inlet temperature . 35F (1.5C) Compact Heatless Air Dryer Series IDW Solenoid valve services kit 20 22 25 32 42 42 57.5 57.5 Optional Extras Maximum working pressure . 232psig Foot mounting bracket 12DVC electric control Wall mounting bracket Minimum