EX510

CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

JXCx-OMY0004

Record data object SLOT Index Record Data SLOT SUB Length (Byte) Details 5 32 bytes Step data No.0 (12) 6 32 bytes Step data No.1 (12) 2 1 68 32 bytes Step data No.63 (12) Details of Record Data Index Offset (Byte) Size Setting items 13 Set range Min. unit 0-1 WORD Movement mode 1:ABS (Absolute) 2:INC (Relative) (10, 14) 2-3 WORD Speed 1 to Max speed of the basic parameter (5, 11, 14) 1mm

High Purity Fluoropolymer

LQ2B5B-F LQ2B5A-F 29.5 35.5 1/2" 7 40 26 32 14 28 36 32 36 37 3/4" LQ2B5D-F 28 Series LQ2 Dimensions Union Elbow: LQ2E Metric sizes Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

HRX-OM-R016

5.14.1 Pressure unit switching . 5-32 5.14.2 Pressure unit switching setting and checking . 5-32 5.15 Alarm buzzer sound setting. 5-33 5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature

JXCx-OMX0009

Details of Power Supply Plug . 32 6.1 Power supply plug specifications . 32 6.2 Electrical Wiring Specifications . 32 6.3 Power Supply Plug Wiring . 33 (1) Wiring of power supply (C24V, M24V, 0V) . 33 (2) Wiring of the stop switch (EMG) . 33 (3) Wiring of the lock release (LK RLS) . 33 6.4 Wiring of shutdown circuit . 34 (1) Example circuit 1Single controller with teaching box . 34 (2) Stop

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 623 3 Port Pilot Solenoid

MTS

32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65

1

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

1 4, 2 (P A, B) 4, 2 5, 3 (A, B EA, EB) Bore size Positions C 13 16 13 16 13 15 13 16 13 15 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 Cv 3.0 4.0 3.0 4.0 3.0 3.5 3.0 4.0 3.0 3.8 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.10 Cv 4.0 4.4 4.0 4.4 4.0 3.7 4.0 4.0 4.0 4.4 C 18 18 18 18 18 15 18 16 18 19 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal

Mini Free Mount Cylinder

(Compared with the CU series cylinders, double acting, without magnet) CU Dimensions (Without Magnet) (mm) CUJ Bore size (mm) A(a) B(b) C(c) 4 6 8 10 12 16 20 10 ( ) 13 (13) 13 ( ) 13.5 (15) 17 ( ) 21 (20) 25 (26) 15 ( ) 19 (22) 21 ( ) 22 (24) 26.5 ( ) 29.5 (32) 36 (40) 13 ( ) 13 (33) 13 ( ) 13 (36) 15.5 ( ) 16.5 (30) 19.5 (36) b B c + Stroke C + Stroke A ( ): Dimensions of the CU series

Hygienic Design Cylinder/Basic Type

Contents Bore size (mm) NBR NBR 12 12 12 12 Bumper A Bumper A Bumper A Bumper A Resin Resin Resin Resin 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 13 !4 13 !4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.)

05-hyq-e

Contents Bore size (mm) NBR NBR 12 12 12 12 Bumper A Bumper A Bumper A Bumper A Resin Resin Resin Resin 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 13 !4 13 !4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.)

CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

CQS

Rear flange Long stroke Standard stroke (mm) Without auto switch With auto switch Without/with auto switch Long stroke (mm) Bore (mm) Standard stroke (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 24 25.5 28.5 32.5 13.5 13.5 14.5 15 32 32 41 44 51 51 63.5 67 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 14 15.5 18.5 22.5 3.5 3.5 4.5 5 26 26 32 35.5 35 to 100 35

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

HRX-OM-W004

A A/B CON screen TYPE No.12 Contact output signal 1 function RUN *1 D.OUT1 Setting function of contact input signal 1. screen SEL Contact output signal 1 operation No.13 A A/B D.OUT1 Setting output operation of contact output signal 1. screen TYPE D.OUT1 No.14 Contact output signal 1alarm AL.01 AL.01AL.32 Setting selected alarm of contact output signal 1.

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32