Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Piping: Base Mounted: Side Ported, Stations & Port Location: 2 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 6 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 8 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 4 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 5 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 12 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 3 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

(mm) B1 H LH LX 22 22 GA GB GC KA LD 138 109 107 103 1/8 AL MM X Y B 52.3 42.3 36.3 30.3 ND 20-0.033 0 7 5.5 5.5 5 K Bore size ZZ S P N L D A H1 I 17 17 13 34 31 31 27 6 6 5 18 15 25 21 8 8 6 6 8 6 5.5, 9.5 counterbore depth 6.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 49 43 43 39 15 12 12 12 104 78 76 76 42.5 34.5 30 24 14 12 10 8 58.5 47 39 33.5 21 19.5 19.5 15.5 40 32 25 20 24 22 22 18

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

2 10 +0.02 3 x 5 0 depth 10 (A, B, C common view) M5 x 0.8 thread depth 5 16 70 (76) Vacuum suction port 11 25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 2 4 5-0.03 0 5-0.03 0 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 With Auto Switch: MDHR2-30R 11221122MDHR2-30E port location B 3 x M5 x 0.8 thread depth 10 P.C.D.43

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

0 -0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

PEND 11-6-1 2 Mini-rotary Actuator Series CRJ Rack & Pinion Style/Size: 05, 1 43 (54) 48 (61) Compact Compact Lightweight Lightweight CRJ05:32 g (39 g) CRJ 1:54 g (67 g) CRJ05: 32 g (39 g) CRJ1: 54 g (67 g) 19.5 23.5 13.5 16.5 Top CRJ05 Bottom CRJ1 Numbers in ( ) are for 180.

60

Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70 75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43

Process Valve

Flow rate characteristics Weight (kg) Orifice diameter (mm) Effective area (mm2) Air operated Model Measured by air Measured by water Port size Rc Kv Conversion Cv External pilot solenoid VNA4-25A VNA5-32A VNA6-40A VNA7-50A 1 220 320 500 770 0.9 1.4 2.2 3.2 2 25 32 40 50 10.4 15.6 24.2 37.2 12 18 28 43 0.8 1.3 2.1 3.1 1 4 1 2 1 1 Specifications Fluid (Main piping) Refer to Table (1) on page

Air Suction Filter

ZFA200 Description Gasket Element AL-204H AL-205H EJ001H-030N EJ101H-030N Element size Element size (mm) 43 x 42 x 12 43 x 40 x 22 Element Replacement 1) Stop operation and reduce the filter's internal pressure to atmosphere. Element 2) Loosen the stop pin and open the cover. 3) Hold the knob on the top of the element and take it out.