25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Programless controller Step motor (servo 24 VDC)

2000 50 2000 100 2000 90 2000 10 150 2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

100 V Grommet Yes 3-wire (NPN equiv.)

IZx-OMP0064

mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Maintenance detection signal Output

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Compact and Lightweight

100 100 100 100 100 Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 80 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Air consumption 60 60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20

LEYx-OMZ0015

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver I/O cable length [m] Applicable stroke table* -10- 100 B 200 T9 B 200 T9 B Motor mounting position Motor type Size 100D 100 Symbol Type Output Size driver Nill Top mountain LECSB2-T9 LECSC2-T9 LECSS2-T9 R Right side AC servo motor parallel Absolute 750W 100 T9 L Left side encoder

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

HRX-OM-W038

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

AMPSeries

N101 Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the

SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

Title not found

PRODUCT SPECIFICATIONS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 (Linear) IP5100 (Rotary) SERIES 20 100 psi SUPPLY PRESSURE STROKE SENSITIVITY LINEARITY HYSTERESIS 0.4" 3.4" 60 100 degrees WITHIN 0.1% F.S. WITHIN 0.5% F.S. WITHIN 1% F.S. WITHIN 0.75% F.S. WITHIN 1% F.S. WITHIN 2% F.S. WITHIN 0.5% F.S.

NAME

Milt Sepdato{ B -Sracket of --tqe r\,4sxoa ibin Deep 028(55) 'Special order only. 'Special order only Conshaction / Parts List SECTION Parts Lbt Parts ib O6dldtxt Mabfd lvbdd r{AEa50 o Element Assembly' Stahless steel Ai/E{1250 AMEI,SO SECTION * lrcludes OnrE aM gasket. Millinters h Pareoftes NAME Series irllainbnance OUsewith dryaironly.

Siiiil"Tivrc

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

Miniature Tubing & Miniature Fittings

Barb elbow Barb fitting Barb one-touch Reducer Port size M3 x 0.5 M5 x 0.8 Tubing size 3.2 4 Port size M3 x 0.5 M5 x 0.8 Fitting size 3.2 4 Piping for compact actuator Scale :100% Scale :100% Scale :100% Piping for compact pressure sensor 4 x 7 Scale :100% Sectional area 113.04mm2 4 75% Reduction 2 x 7 Sectional area 2 28.26mm2 Easy size reduction Reduction of the tubing size from standard

PF2D

The flow rate used during measuring is 100 cc/min. LFE Tube PF2D PF2D Processing chart for PF2D series IF Remote type sensor unit Assembly Common environment Body Vibration reducing seals Malfunctions (output errors) that would otherwise be caused by vibration are prevented.

Precision Clean Regulator

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure