Series 12-REA Sine rodless cylinder

Caution 6. Special tools are necessary for disassembly. 6. Apply additional tightening when remounting the head cover after disassembly. When disassembling, hold the wrench flat section of one head cover with a vice, and remove the other cover using a spanner or adjustable angle wrench on its wrench flat section.

76

(For air ow capacity, refer to the Data E below.) 5 Options Refer to page 9. 6 Finalize the model number. Refer to page 2. 7 Select the optional accessories. Refer to page 10.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

VND

Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions. External Pilot Adiabatic Space Caution Caution Piping of pilot port (P1, P2) P1 and P2 piping should be as follows according to the model. There is a space between body and cover (: approximate 1 mm) for adiabatic effect.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Compact Guide Cylinder End Lock Type SeriesMGP

M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

Miniature Regulator Series ARJ310

5 q u o Material Note Parts list !

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 6) For options: E1, E2, E3, E4. This product is for overseas use only according to the new Measurement Law. (The SI unit is provided for use in Japan.) Note 7) : For thread type, NPT only.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 6) For options: E1, E2, E3, E4. This product is for overseas use only according to the new Measurement Law. (The SI unit is provided for use in Japan.) Note 7) : For thread type, NPT only.

Vacuum Saving Valve

Pad side q u Description Component Parts Material Surface treatment No.

l

6 !7 !8 !

Toggle Type Air Gripper

(Light ON) One auto switch One position, either q or w, can be detected. Detection combinations Two auto switches Two positions q and w can be detected. How to determine auto switch installation position Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.

AC20-A to AC40-A

Example)AC30-F03DM-KSTV-13NR-A q r t y w e q Symbol Bodysize Description 20 25 30 40 Rc NPT G Nil N F Threadtype w + 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 Portsize e + Floattype autodrain a Withoutautodrain N.C.(Normalclose)Drainportisclosedwhenpressureisnotapplied. N.O.(Normalopen)Drainportisopenwhenpressureisnotapplied.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

5) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) When circulating uid outlet port pressure return port pressure = 0.25 MPa.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Note 5) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200/400 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.

 

Symbol 16 mm 22 mm Pilot port position Application Example Cleaning equipment 5 6 Position Symbol q w e r Applicable tubing size Nil 2 3 4 Applicable series LVP5 Tubing outside diameter 22 mm 26 mm 32 mm Symbol 16A 20A 25A Refer to the above.

How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications Nil None 10 For positive pressure Q CE-compliant 11 For vacuum and residual pressure ฀The PS1200 series is CE- 12 For vacuum compliant (with Q) only. Piping specification

RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Nil Q None CE-compliant Output specifications 10 11 12 For positive pressure For vacuum and residual pressure For vacuum The PS1200 series is CEcompliant (with Q) only.

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description Bracket (With bolt and washer) B How to Order Pilot Solenoid Valves VO307 1 Q D 5 CE-compliant Nil Q CE-compliant Rated voltage 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz Light/surge voltage suppressor CE-compliant 3 110 VAC 50/60 Hz D DIN terminal DZ DIN terminal with light/surge voltage suppressor 4 220 VAC 50/60 Hz 5 24 VDC 6