EXxx-OMW0014CN

LED EX245-LA1/LB1 LED LED . 9-15 4 (C/Q) LED No.0,2,4,6 LED Port deactivated (L+) (ON/OFF1Hz) IO-Link IO-Link (ON/OFF2Hz) IO-Link Device IO-Link (L+C/Q) OFF Digital input ON (L+) OFF Digital output ON (L+C/Q) . 9-16 2 (I/Q) LED No.1,3,5,7 (EX245-LA1A) LED status Description I/Q OFF Digital input (I/Q) I/Q ON . 9-17 2 (P24) LED No.1,3,5,7 (EX245-LB1B) LED status Description

Air Slide Table Series MXP

5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VXA21/22

Refer to table q for configuration.

5 Port Solenoid Valve Series VQZ1000/2000/3000

SZ 75 VP4 39.5 S0700 VQ VQ4 Individual SUP spacer VVQZ1000-P-5-M5 (-Q) (for VQZ1000) VVQZ2000-P-5-01 (-Q) (for VQZ2000) VVQZ3000-P-5-02 (-Q) (for VQZ3000) VQ5 + Rc1/8:VQZ2000 M5:VQZ1000 VQC Rc1/4:VQZ3000 VQZ D Supply port can be installed individually by mounting an individual supply spacer onto the manifold block.

Modular Type Filter Regulator Series AW

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

High Vacuum Angle Valve

With heat-resistant 2-color indicator solid state auto switch Sensor How to Order Amplifier q w e r t y u XL 2 M9NJL A A 40 H4 Heater XLA w Flange size q Series e Indicator/Pilot port direction Rear flange surface Size 25 40 50 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Valve type Shaft seal type A Single acting (N.C.)

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CM2

Construction Construction 1.4-8 Series CM2 Construction Component Parts Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Carbon steel Material Note Note White anodized No. q e r t y u i o !0 !1 No. !2 !3 !4 !5 !6 !

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Free Mount Cylinder Series CU

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Modular/F.R.L. Units Series AC

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

Membrane Air Dryer

0 q q plug y Purge air for dehumidification i plug i Purge r Purge Purge air for dehumidification Component Parts Material Description No. Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.)

MQQ

2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

CXWM/CXWL

9 @0 No. q w e r t y u i o Rod cover Housing Piston Piston rod Plate Adjusting bolt Hexagon socket head set screw Snap ring Magnet Spring Type CR snap ring Round R type retainer Shock absorber Hexagon socket head set screw Hexagon socket head plug Hexagon socket head set screw Piston seal Rod seal Cylinder tube gasket Piston gasket Locking body Lock finger Lock piston Rod cover Steel ball