Table Accuracy: Basic, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable

Table Accuracy: Basic Type, Max. Rotating Torque: Basic, 6.6 N.m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: Ether Net/IP™, Mounting: DIN Rail, I/O Cable: -

Table Accuracy: Basic Type, Max. Rotating Torque: High Torque, 10 N▪m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: Ether Net/IP™, Mounting: DIN Rail, I/O Cable: -

Table Accuracy: High-precision Type, Max. Rotating Torque: High Torque, 10 N▪m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: Ether Net/IP™, Mounting: DIN Rail, I/O Cable: -

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.32, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 320°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator

Table Accuracy: Basic Type, Max. Rotating Torque: J (Basic, 6.6 N.m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Table Accuracy: Basic Type, Max. Rotating Torque: K (High Torque, 10 N▪m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Table Accuracy: H (High-precision Type), Max. Rotating Torque: K (High Torque, 10 N▪m), Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

Digital Flow Switch Series PFA For Air Series PFW For Water

10l/min 5 to 50l/min 20 to 200l/min 50 to 500l/min Flow rate measurement range Minimum setting unit 1% of maximum flow rate l/min, CFM x 10Accumulated flow l/min, CFM x 10Real-time flow rate Display units Note 1) l, ft x 10Operating pressure range Withstand pressure Pressure loss 0 to 0.5MPa 1.0MPa 10kPa (at 200l/min) 30kPa (at 500l/min) 3kPa (at 50l/min) 3kPa (at 100l/min) 0 to 9l 0 to 50C

2/3 Port Valve

Normally closed Normally open VNA01 VNA02 VNA03 Valve Double acting Pressure range Lubrication Temperature Style External pilot air 5C to 50C(Air operated: 60C) Note 1) No freezing Note 2) Lubrication is not allowed in case of seal material EPR.

Modular F.R.L. Units

Recommended lubricant [AL] Class 1 turbine oil (ISO VG32) Bowl material [AW/AL] Polycarbonate Bowl guard [AW/AL] Semi-standard (Steel) Standard (Polycarbonate) Construction [AW] Relieving type Weight [kg] 0.33 0.63 1.15 1.25 3.21 3.36 1 Pressure gauge connection threads are not available for F.R.L. unit with a square embedded type pressure gauge or with a digital pressure switch. 2 5 to 50C

Modular Design with Uniform Body Style

. *2 5 to 50C for the products with the digital pressure switch *3 For the following conditions in accordance with [Test condition: ISO 8573-4:2001 compliant, Test method ISO 12500-3:2009 compliant] Conditions: When a new element is used, and the flow capacity, inlet pressure, and the amount of solid bodies on the filter inlet side are stable *4 The compressed air purity class is indicated