3

Symbol Port gal gal gal/min gal/min size 11 21 F J 25 30 $ 25A 30A 32 mm 38 mm L/min L $ JIS K6742 equivalent Under the New Measurement Law, units other than SI (symbol M) cannot be used in Japan.

DOC1020530

Network setting . 34 7.1 EtherCAT Communication . 34 7.1.1 EtherCAT Network card (LEC-S-NE) . 34 7.1.2 EtherCAT Communication setting . 35 7.2 EtherNet/IP . 36 7.2.1 EtherNet/IP Network card (LEC-S-N9) . 36 7.2.2 EtherNet/IP Communication setting . 37 7.3 PROFINET . 38 7.3.1 PROFINET Network card (LEC-S-NP) . 38 7.3.2 PROFINET Communication setting . 39 8.

JXCx-OMU0024

Parameter setting . 32 (1) Exclusive parameter setting for the connected actuator . 32 (2) Change of controller and actuator settings . 35 (3) Electoronic gear ratio (It is necessary to set when the different lead actuators are connected) . 36 (4) Change of the parameter protect setting . 37 4.3 Step data setting . 38 (1) Step data setting . 38 (2) Saving or Loading the Step data . 40 4.4

ZQ-OM01601

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Air preparation filter

170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

Mist Separator Regulator

Mist separator regulator Model Tool size Amount of retightening Reference torque AWM20-D 34/38 2.0+/-0.2 Nm 2 to 5 notch AWM30-D 52/55 3.5+/-0.3 Nm AWM40-D 52/55 4.0+/-0.4 Nm 8-2.

Ｍ icro Mist Separator Regulator

Micro mist separator regulator Model Tool size Amount of retightening Reference torque AWD20-D 34/38 2.0+/-0.2 Nm 2 to 5 notch AWD30-D 52/55 3.5+/-0.3 Nm AWD40-D 52/55 4.0+/-0.4 Nm 8-2.

ZISE30A.eng

Bracket A (Model: ZS-38-A1) Bracket B (Model: ZS-38-A2) Bracket C (Model: ZS-38-A3) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

PSxx-OMT0001CN

210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 30PSI0.2MPa PSI 2 0.4MPa 0.2MPa 0.4MPa 0.2MPa MPa MPa/PSI 2 11/8 2SI -12No.PS-OMT0001CN-E 2 2 VX210X276 X276 DIN 2 AC100V AC110V Z (1/8) 1 () ((38

EXxx-OMZ0016

Parameter settings of a Remote (optional) 38 Remote setting 38 Parameter settings of the Base 40 CC-Link setting 40 System setting 42 Frequency channel select function (F.C.S.) 45 Event 47 Wireless 49 Pairing and Unpairing Procedures 51 Pairing Procedure 51 Unpairing Procedure 56 Mounting and Installation of Units 58 EXW1-BMJ*, EXW1-RD* 58 Troubleshooting 61 Technical Information

4 Port Solenoid Valve Series VQD1000

%% # V100 S070 VQD VKF VK VT VS * * * +% Series VQD1000 Dimensions/Base Mounted L plug connector: VQD1251-L-M5 M plug connector: VQD1251-M-M5 5 5 5.5 B A Lead wire: White Lead wire: Red 28 Lead wire: Black Indicator light * In the case of +COM B A PUSHU/TURN B C A 11 SMC 17.5 11.2 9 R 3 Direct manual override 5.5 10.9 9.1 27 2 x 3.5 mounting hole Lead wire length 300 mm 5 60 58.5 (5) (38

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Content 40 50 63 A set of above nos. 29, 34, 35, 36, 37, 38, 39 and 40.

Soft Start-up Valve AV2000/3000/4000/5000

40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1

Air Cylinder CLA Series Fine Lock Model

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l

MXH Series Compact Slide

Auto switch groove positions (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4-4.2 Auto switch mounting groove B A 38

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA3-37 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PAX1-39 KT-PA5-38 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve kit KT-PB1-1 Check

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve kit KT-PB1-1 Check valve kit

3 Position Cylinder Series RZQ

32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 50 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 56.5 40 42 39.5 12 Series RZQ Auto Switch Mounting Follow the procedures below to mount auto switches.

Antistatic One-touch Fittings Series KA

13.4 13.4 18 40 26 Uni thread 1 8 1 4 KAU08-U01 KAU08-U02 50.5 52 46.5 46 27 25 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 28 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.