Clean Series: 10 (Clean Room), Stations: 09, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry)
Clean Series: 10 (Clean Room), Stations: 12, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: B (w/Back Pressure Check Valve)
Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 02, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU3 (w/5 m Cable, Top Entry)
Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 06, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU3 (w/5 m Cable, Top Entry)
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: T (Calibration
Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)
Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration Certificate
Series: 3 (VQZ3000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 3 (VQZ3000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting), Thread: Rc, Foot Bracket: F (Bracket), CE Compliant: Q (CE Marked)
Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting), Thread: Rc, Foot Bracket: None, CE Compliant: Q (CE Marked)
Series: 2 (VQZ2000), Configuration: 4 (3 Position Exhaust Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 3 (VQZ3000), Configuration: 2 (2 Position Double), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 1 (VQZ1000), Configuration: 4 (3 Position Exhaust Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 2 (VQZ2000), Configuration: 2 (2 Position Double), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting), Thread: Rc, Foot Bracket: None, CE Compliant: Q (CE Marked)
Series: 1 (VQZ1000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting), Thread: Rc, Foot Bracket: F (Bracket)
Series: 3 (VQZ3000), Configuration: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 3 (VQZ3000), Configuration: 3 (3 Position Closed Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)
Series: 3 (VQZ3000), Configuration: 4 (3 Position Exhaust Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)