IDX-OM-W093

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5

High Pressure Coolant Valve

(3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5

High Power Cylinder:

5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

Title not found

8 10 12 19 25 W/O nuts and bushings W/O nuts and bushings 1/8 3/16 1/4 3/8 1/2 3/4 1 Standard Size With Reducer Tubing Insertion T ools LQ-GJ Smaller Diameter Tubing How To Order LQ GJ Nil B None With bracket Type Table 1.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

2 I/O cable length*1, Communication plug Nil Without cable (Without communication plug connector)*3 1 1.5 m 3 3 m*2 (Programless type) NPN 1P PNP 5 5 m*2 A 10 m* MJ LECPMJ*2 *3 (CC-Link direct input type) S Straight type communication plug connector*3 B 15 m* T T-branch type communication plug connector*3 C 20 m* AN LECPA*2 *4 (Pulse input type) NPN AP PNP *1 When Without controller/driver

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

LEYx-OMZ0015

Double clevis: Clevis pin, Type C retaining ring for axis, Body mounting bolt. -13- 3.

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

New

L-bracket Port size 3 3/8 Note) Note) The exhaust C port size is 1/4".

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

MU

(#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90 80 80 80 ZZ 116 130 142 173 185 Z 108 120 132

VFRA3000

-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold.

Brake mechanism added

4 3 2 1 699

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

Ejector Valve Unit Series ZYY/ZYX

position 3 port solenoid valve Type of actuation Closed center ZQ Fluid Air ZH Operating pressure range 0.2 to 0.6 MPa ZYY3000 Series 5 to 50C Ambient and fluid temperature ZU Allowable voltage fluctuation 10 to +10% ZL Grommet : G, H L plug connector: L, LN, LO Electrical entry M plug connector: M, MN, MO ZY 0.5 W (With indicator light: 0.6 W): Series ZYY3000 Power consumption 0.6 W (With

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

10

5 w i !2 !1 et y u o !0 q !6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

DOC1020530

occurred. 1: A warning has occurred. 7 W 8 The value at reading is undefined.

Process Valve

VN6-A4BC-3 VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA VN7-A4BB VN7-A4BC VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA-3 VN7-A4BB-3 VN7-A4BC-3 Seal Plate assembly Note 1) FKM EPR 3 material NBR Valve element Seal Note 1) A F A F FKM EPR 32 to 50 come in valve element assembly 4 material Pilot solenoid valve SF4--23 (Refer to the table below.)

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

0 w !2 ASR ASF Component Parts Component Parts No. Model No.