5 Port Air Operated Valve

276 303.5 331 358.5 386 413.5 441 468.5 496 523.5 551 71.5 99 126.5 154 181.5 209 236.5 264 291.5 319 346.5 374 401.5 429 456.5 484 511.5 539 566.5 1521 VFA3000/5000 Series Dimensions: VFA5000 Series Type 40: VV5FA5-40-2-02: Common exhaust 6.5 L2 L1 28 4 x 7 20.5 (For mounting) 13 66 50.5 59.5 B A B A B A B A B A PE PE 47 47 R P R R R 138 27.5 119 55 71 79 P 1.3 3/8 [1 (P), 3/5 (R) port

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M1E m x g FE M3E = 1/3 x FE x L2 (FE = 1.4/100 x a x g x m) = 0.05 x a x m x L2 = 0.05 x 300 x 0.5 x 0.04 = 0.3 [Nm] 3B = M3E/M3E max = 0.3/1.07 = 0.28 Investigate M3E. a From above, find the value of M3E max at 420 mm/s in Graph (3).

Low Profile Guide Type

CY1F CY1F M1E m x g FE CYP M3E = 1/3 x FE x L2 (FE = 1.4/100 x a x g x m) = 0.05 x a x m x L2 = 0.05 x 300 x 0.5 x 0.04 = 0.3 [Nm] 3B = M3E/M3E max = 0.3/1.07 = 0.28 Investigate M3E. a From above, find the value of M3E max at 420 mm/s in Graph (3). M3 M3E m x g FE L2 DFrom above, n = 1 + 2 + 3A + 3B = 0.1 + 0.082 + 0.35 + 0.28 = 0.812 From n = 0.812 1, it is applicable.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M1E m x g FE M3E = 1/3 x FE x L2 (FE = 1.4/100 x a x g x m) = 0.05 x a x m x L2 = 0.05 x 300 x 0.5 x 0.04 = 0.3 [Nm] 3B = M3E/M3E max = 0.3/1.07 = 0.28 Investigate M3E. a From above, find the value of M3E max at 420 mm/s in Graph (3).

240

The rod is manufactured to precise tolerances, so even a slight deformation may cause a malfunction and damage.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

343 362.5 373 66 Series VQ1000/2000 VQ1000/Flat Cable Kit Stations VV5Q11J 0-(D) U S (L4) Applicable connector: Flat cable connector (20P) (L3) 5.2 (conforms to MIL-C-83503) L2 23.5 Indicator light L1 28 P = 10.5 27 8.8 (12) 13 Manual override 1.5 4.8 7.7 18.7 (12) A B A B A B A B A A A (5.5) 40.5 66 93.5 = 2 40.7 (35) 35 52 61.5 63.5 4-M4 mounting hole Stations D Side U Side 1 2 3 4 5 6

LEC-OM071xx

n e l D i s p l a y a n d SigmaWin+TM 2.

Mechanically Jointed Rodless Cylinder Series MY1

consists of a left support and a right support.

Step Motor Controller

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Title not found

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

10

flow rate of 14.1 scfm [400 L/min] (ANR) is P1 29 psi (0.2 MPa) for a 4 orifice and P1 84 psi (0.58 MP)a for a 3 orifice.

Vacuum Unit

B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC(

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Vacuum Module Series ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines. Thus, in case of an error, each valve can be turned OFF to minimize the influences on other pads.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

VS7-6

To use a perfect valve and a spacer style regulator, use a manifold or a sub plate as the standard and stack in the following order: the perfect spacer, spacer style regulator, and the valve.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L3 L4 1.12-20 VQZ1000/2000/3000 Body Ported VQZ2000 (35) (5.5) 44.5 Mounting holes VV5QZ22 C 28 (11) Station 20 (7.5) DIN rail clamp screw n-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Pitch) P=19 1/8 (A port) 21 46 Series SYJ700 Type 21R Manifold: Top Ported (External Pilot Type)/SS3YJ7-21RStations (-00) [ ] for AC Grommet (G) M5 x 0.8 (X port) 63.5 L2 L1 30.5 21.5 6 1.5 14 22.5 9.5 6 21.5 49 (DIN 50.3) 26 X P A A A A 43 71.2 [73.4] 2-5.5 (For mounting) R 1/4 (P, R port) 1/8 (A port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) (Station n) (Station

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.