3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21 VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.
Option symbol P High-Pressure Pump Mounted P HECR Applicable model HECR002-A5-P HECR004-A5-P HECR006-A5-P HECR008-A5-P HECR010-A2-P HECR008-W5-P HECR012-W2-P High-pressure pump mounted Possible to choose a high-pressure pump in accordance with users piping resistance.
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D20Port Connection port on 2 sides Port (Nominal size) 10 15 20 30 Auto switch Series Variations MHR2 P. 12-5-4 to P. 12-5-17 2 Finger MDHR2 Rotary actuated air gripper MHR3 P. 12-5-18 to P. 12-5-26 3 Finger MDHR3 12-5-3 4 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 Size: 10, 15, 20, 30 How to Order MHR 2 10 R Without auto switch With auto switch (Built-in magnet) MDHR 2 10 R M9N
VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145
5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 5-5-16 5 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA54231 83.9 26.1 Rc 1/8 3.5 NO NC (PA
Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?
d d RW RW M20 x 1.5 QW PW GP PB W E Y Z 2 x P (Rc, NPT, G) G G 2 x RB2015 (Option) 2 HT F A L HN (Max.)
Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.
Nil 3 S n B L F G C D T Type Lube Non-lube Air-hydro MB Nil N H MB1 Auto switch Without auto switch Refer to the table below for the applicable auto switch model.
T VMG Union Y P. 60 KCU Use to branch line in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 60 KCJ Use to add the selfseal mechanism to the usual One-touch fittings, Series KQ. Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function.
LOP Control change When operating in two modes, the control mode will be changed. 11 - (3) Output signal Position control mode: P, Speed control mode: S, Torque control mode: T : Initial setting, : Assignment is available with parameter,: Assignment is not available Device name Symbol P S T Function ALM Problem This signal turns off while alarm is generated.
2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1)/t L /min(ANR) V : Inner volume = cm3 P : Absolute pressure = {Operating pressure (MPa) + 0.1} t : Operating time = s Calculate the required air volume separately for the linear motion part and the rotary motion part.
connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5
The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1)/t l/min(ANR) V : Inner volume = cm3 P : Absolute pressure = {Operating pressure (MPa) + 0.1} t : Operating time = s CRB2 CRBU2 CRB1 Calculate the required air volume separately for the linear motion part and the rotary motion part.
Mounting, Operation P.12 1) Operating air P.12 2) Precaution on design P.12 3) Mounting P.14 4) Operating environment P.15 5) Piping P.16 6) Cushion P.17 7) Speed control P.18 8) Direction control P.19 4. Maintenance P.20 1) Inspection P.20 2) Overhaul P.21 3) Disassembly P.22 4) Assembly P.23 5) Expendable supplies P.24 6) Replacement procedure of seal P.25 7) Inspection P.26 5.
P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.