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Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

3 Position Cylinder Series RZQ

B A [mm] Proper mounting position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F D-F9 D-F9V D-F9W D-F9WV D-A79W D-F7LF D-A9 D-A9V D-F9BAL D-P5DWL D-A7,A80 Bore size (mm) A B A B A B A B A B A B A B A B 32 29 39.5 30 40.5 26 36.5 31.5 42 24.5 35 27.5 38 27 37.5 40 46 33 45 34 47.5 30 42 35.5 43.5 28.5 40.5 31.5 31 43 27 39 50 46 47 35.5 43 36.5 48.5 32.5 41.5

RZQ

30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 Data 40 44 35 36 42 38.5 41.5

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

Digital Pressure Switch

18.3 10.4 -79No.PS-OMU0006-D Bracket mounting dimensions Bracket A Bracket B -80No.PS-OMU0006-D Mounting dimensions of panel mount adapter Mounting dimension of panel mount adapter + Front protective cover -81No.PS-OMU0006-D Panel cutout dimensions Mount individually More than 2 pcs.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

2 x 4J E MB MA KA MC C NB N K B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC

Cylinder

D-iJI. P-30@ 3rd pnnting February 1990 30 :1); Specifications subject to change without notice. Printed in Singapore 16-4, lCHOME, SHIMBASHI, MINATO-KU, TOKYO, 105, JAPAN. Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

) L2 L1 P=16 P=16 15.5 3 2 1 18 Station 5 D side 50.5 22.5 300 (Lead wire length) 3 70 Cover diameter 1.4 Cross sectional area 0.2mm2 59 PE port (30) R 3 1 P 25.5 11 M5 x 0.8 External pilot port 1/4 NPTF 20 12.5 (Only external pilot type (R)) P(SUP) port 38.5 1/4 NPTF The broken line indicate DIN rail mounted type [-D]. 43.5 11 R(EXH) port L type plug connector (L) DIN connector (Y) 300 90

HRX-OM-I051

This system Your system Communication data TEMP PV 30 TEMP PV TEMP PV 30 External communication 30 TEMP SP 30 Discharge temp: OFFSET 1 31 dissipation: Heat 1 Circulating fluid temp. in your system: 30 Figure 8-9 When MODE3 is selected HRZ Series 8.4 Offset Function 8-21 HRX-OM-I051 Chapter 8 Appendix 8.5 BAND/READY function Sets BAND to TEMP SP value, and notifies TEMP PV value reaches

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

Air Slide Table Series MXJ

4.5 4.5 22 18 18 8 13 14 4.5 4.5 3.5 3.5 29 29 18 18 9 8 13 Reed auto switch D-A9V Solid state auto switch D-M9V D-M9WV D-F8 D A Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

1.63

D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V 20 to 63 B A Hs 32 to 63 D-P3DWA B A Hs Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9V D-P3DWA D-M9V D-M9WV D-M9AV D-A9 D-A9V D-P3DWA Bore size (mm) Bore size (mm) B 11 12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

F/ISE

30 20 2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VP4 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VQ L A Dimensions VQ4 Applicable fitting d Part No.