VVX31/32/33

(C ) Temp. conditions Power source 1.0 High temp. water (X, E, N, P) 60 40 5 0.82 0.20 0.20 Water (Std.) Oil (D. N) Steam (S,Q) Oil (Std.) VX3235-00 VX3335-00 3 1.1 0.25 0.27 AC DC 60 40 1 99 60 120 183 Maximun VX3245-00 40 1.6 0.20 0.38 4 20 VX3345-00 Minimum AC, DC Ambient temperature (C ) 40 10 Operating fluid temp.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

SI Unit for Vacuum Manifold

Vacuum/ReleaseInstruction Table 4-10.

Fieldbus system Digital unit

position Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Input signal Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Input signal assignment (EX600-DX E ) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 2 Input 4 Input 6 Input 8 Input 10 Input 12 Input 14 Input signal Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Pin number 14 15 16 17 18 19 20 21

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Card Motor

[I/O cable] PLC Controller I/O cable LATH2 1 PLC side Controller side Cable length (L) 1 3 5 (10) L 1 m A1 (Red) 3 m 5 m (18.6) Conductor size: AWG28 (6) A C B (15.4) Parallel I/O Plug Terminal List Polarized key A1 (Red) Fused Fused (10) Terminal no. Terminal no.

240

H:Distance from the cylinder center axis to the mounting surface for the table L MXY H dimension (mm) MXH6 MXH10 MXH16 MXH20 MTS 24.5 30.5 34.5 41.5 Cylinder shaft center m Load center of gravity Selection Graph z to c (Vertical Mounting) Graph c c Maximum Speed 500 mm/s or Less Graph z z Maximum Speed 100 mm/s or Less 1 100 10 Mass m (kg) Mass m (kg) 20 0.1 16 20 16 1 10 10 6 6 0.01 0.1

MHL2

10 0.3 MP 0.3 MPa 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MP 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0 10 20 30 40 50 60 70 0 20 40 60 80 100 120 0 20 40 60 80 100 120 10 20 30 40 50 60 70 0 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-25D1 2 MHL2-20D1 2 MHL2-20D MHL2-25D 200

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

MPa 5.0 MPa Rated pressure range 2.0 MPa 1.0 MPa 1.6 MPa 1.0 MPa Withstand pressure 1.5 MPa 2.4 MPa 3.0 MPa 5.0 MPa 12.5 MPa 30 MPa Power supply voltage When used as a switch output device 12 to 24 VDC 10% with 10% voltage ripple or less When used as an IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Temperature characteristics 2% F.S. (25C standard) 3% F .S.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Suction flow rate L/min (ANR) Size 10/16 20/25 10 to 60C 0.01 180 c.p.m.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

type snap ring for hole Piston y Nickel plated (15) (10, 25) Electroless nickel plated (10, 15) (Only for 25) Piston nut u i C type snap ring for shaft Snap ring @9 Shaft Zinc chromated (15, 25) Zinc chromated (10) Zinc chromated (15, 25) Zinc chromated (10) #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 Rolled steel plate Piston side yoke o Chrome molybdenum steel Hexagon socket head set screw Nickel

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

type snap ring for hole Piston y Nickel plated (15) (10, 25) Electroless nickel plated (10, 15) (Only for 25) Piston nut u i C type snap ring for shaft Snap ring @9 Shaft Zinc chromated (15, 25) Zinc chromated (10) Zinc chromated (15, 25) Zinc chromated (10) #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 Rolled steel plate Piston side yoke o Chrome molybdenum steel Hexagon socket head set screw Nickel

IDX-OM-W095

. 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2

125

2(A) 2(A) 1(P) 3(R) 2(A) 2(A) 3(R) Air operated Model Port size (External/ Internal) Pilot solenoid C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b VEX312-01 1/8 2.4 0.19 2.4 0.31 2.3 0.36 2.5 0.22 0.1 0.2 VEX312-02 1/4 3.5 0.35 3.3 0.49 3.1 0.46 3.5 0.33 0.1 0.2 VEX332-02 1/4 4.1 0.36 4.3 0.42 4.1 0.41 4.6 0.25 0.3 0.4 VEX332-03 3/8 8.7 0.29 7.9 0.52 7.8 0.51 8.7

Moisture Control Tube

Single Piston Actuator size Recommended model Piping condition Bore size (mm) Stroke (mm) Tube O.D. 2 mm IDK02-100 IDK02-200 Tube O.D. 4 mm IDK04-100 IDK04-200 Tube O.D. 6 mm IDK06-100 IDK06-200 Tube length (m) 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 2.5 All strokes 4 All strokes Less than 10 6 10 or more Less than 10 8 10 or more Less than 10 10 10 or more Less than 10

0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400

Series MLGP

Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2. Maintenance 10-3. Construction 11. Auto switch P19 11-1. Applicable auto switches 11-2. Minimum auto switch mounting stroke 11-3. Auto switch proper mounting position (detection at stroke end) and its mounting height 11-4. Auto switch operating range 11-5.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

(N.C. type) B, D (N.O. type) E (Double acting) VX2 Air/Inert gas Fluid Specifications 10 to 60C (No freezing) Fluid temperature Piping size Symbol Passage VXD A B C D E N.C. 1/4" fitting integrated type 10 to 60C (No freezing) Ambient temperature N.O. 1/4" fitting integrated type 0 to 22.0 MPa 0 to 20.0 MPa Operating pressure range VXZ Flange type N.C. 35.0 MPa Proof pressure Flange type

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and