Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Lubricator Series AL10 to 60

11 2 3 6 8 C R 3W Z Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size F.R.L. 10 20 30 40 50 60 AV Thread type Metric thread (M5) Rc NPT G AU Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body

SI unit for DeviceNet TM

(Between FG and external terminal) Environment Insulation resistance 10 M or more (500 VDC, Between FG and external terminal) Ambient temperature Working temperature: -10 to +50 oC Storage: -20 to +60 oC Ambient humidity 35 to 85%RH (Non condensing) Operating atmosphere No corrosive gas Standard UL/CSA (E209424), CE marked (EMC directive, RoHS directive) Weight 110 g or less (Including accessories

S Couplers

-10F) 25 5 KKA4 Series (KKA4P-02F+KKA4S-02F) 20 4 15 3 10 2 KKA3 Series (KKA3P-01F+KKA3S-01F) 5 1 KKA7 Series (KKA7P-06F+KKA7S-06F) 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Plug: Without check valve Socket: With check valve Plug: Without check valve Socket: Without check valve 10 10 9 9 KKA6 Series (KKA6P-04M-1+KKA6S

MHx-OMM0057

MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18 16 MHL2-40D M0X1.5 24 12 MHL2-40D M10X1.5 36 20 Nm MHL2-10D M4X0.7 2.1 MHL2-16D M5X0.8 4.3 MHL2-20D M6X1 7.3 MHL2-25D M8X1.25 17.7 6 - 1. 2. 2 <> AS1200-M5AS2200-01 AS1000AS2000 AS1001FAS2051F

V

Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering

AS

1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch ttings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. 1 Fluorine grease is used. 2 The cleanliness class (ISO class) is 5.

AS_FS Inline

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

E-ITV-STD-RF-A

Lock keys ( ref er t o P8) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 90% 100% 120% 100% 0% 0% 10% 20% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 20% t o 90% of t he rat ed val ue. ( D EFAU LT VALU E: 0% ) ( N ot e 2) : The pressure of l ess t han 0%

Vacuum Filter AFJ Series

[L/min (ANR)] 80 m 80 m AFJ20-02-80-S/AFJ30-03-80-S/AFJ40-04-80-S AFJ20-02-80-T/AFJ30-03-80-T/AFJ40-04-80-T 12 12 AFJ20-02-80-T AFJ30-03-80-T AFJ20-02-80-S AFJ30-03-80-S AFJ40-04-80-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500

EXW1-NT1_eng

NFC Reader/Writer Operation Manual EXW1-NT1 P/N:CIR315C-01 IC ID: 21344-WEX06 FCC ID: 2AJE7SMC-WEX06 CAN ICES-3 (B)/NMB-3(B) U.S.

Guide Cylinder

Otherwise, the guide parts has twisted and lead to a malfunction. -10- 10) Mount in locations where maintenance will be easy.

VQZ Series

Air temperature() -20 -10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 8 No.VQZ100V-OMK0002-B VQZ Series/ / / /Specific Product Precautions 1 Be sure to read this before handling How to Use Plug Connector Manual Override 1.

AW20-B to AW60-B

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

2% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)