Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) 1 Direct Operated Precision Regulator/Modular Style Series ARP20 to ARP40 Series ARP20K to ARP40K Direct Operated Precision Regulator with Backflow Function/Modular Style ARP40/ARP40K ARP30/ARP30K ARP20/ARP20K Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Nil R Flow direction d

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

For D-P4DW, 40 to 63 are available. Only D-P4DW type is assembled at the time of shipment. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Since there are other applicable auto switches than listed, refer to page 18 for details.

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Electro-Pneumatic Positioner NIP600.NIP610

4 60 PSI (4kg|/cm') 6 90 PSI (6kglicm") lnput Current 0-4-20mADC(standard) . l 1 5 m A D C ' 2 2 1 0 m A D C ' 3 5 2 5 m A D C *4 10 50 mADC ' Special Order o ,,' Ogeration'/ Construction Model MmOO(Lever type) Single acting, Normal operation When the input current increass, the armature witt be subjected to a clockwise torque, pushing the flapper lever to the teft.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

No more element replacement!

D-DN This catalog is printed on recycled paper with concern for the global environment.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Speed Controller: Standard Type Large Flow In-line Type AS Series

Description Material AS800 AS900 6 7 8 O-ring O-ring Spring NBR NBR Stainless steel KA00069 KA00460 14115 KA00072 KA00462 14124 ASN AQ ASV Dimensions: AS420/500/600 Dimensions: AS800/900 AK VCHC ASR ASQ 2 x Port size 2 x Port size L3 L2 L1 D Dimensions L1 L2 D Min. L3 (1) Model Port size Max.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Digital Flow Switch (Integrated display type)

D Digit Minimum unit for setting / display is 1 digit. When the minimum unit for setting / display is 5 L/min, 3 digits will be 3 x 5 = 15 L/min Display flow range The range which can be displayed by the product with a digital display. F Fluid temperature Range of fluid temperature that can be measured by the product.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 14 Revision 18-Aug-2020 Revision D Completely revised by format change.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 13 Revision 18-Aug-2020 Revision D Completely revised by format change. Change the part number of amp for the sensor.

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

EXxx-OMK0006

Correspondence between output data and valve manifold : Output numbers are assigned to stations from side D to U of manifold in order. (See manual of each valve manifold for the directions of side D and U) : Standard manifold is wired in double. Output numbers are assigned to side A and B alternatively. In case of single solenoid valve, output on side B is free.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Ambient and fluid temperature (C) 10 or less Response time (ms) (1) 20 Max. operating frequency (Hz) Manual override Non-locking push type, Locking slotted type Push-turn locking slotted type Push-turn locking lever type {SY1 4, SY1 4A only} 1 2 1 2 Not required Lubrication Unrestricted Mounting position 150/30 Impact/Vibration resistance (m/s2) (2) Body ported Dustproof Enclosure Note 1)