Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Operating pressure (MPa) 1778 Series VPA450/470 5 Port Air Operated Valve Flow Characteristics/Mass Port size Function Flow characteristics Mass (kg) 14/2(PA/B) 4/25/3(A/BEA/EB) Valve model b Cv b Cv 15 17 21 15 17 21 16 18 22 16 18 22 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1

VK300

Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39

Vacuum Unit Series ZK2

With one bracket for mounting a single unit (Mounting screw is attached.) 12 C B 15 F Use for pilot pressure exhaust piping (Standard pump system is released to the atmosphere.)

SI unit for CC-Link

Investigate the cause of the voltage fluctuation, and take countermeasures against it. 15 to 30 VDC Check that the solenoid valve power supply voltage is within the specified range.

IDX-OM-W053

V 15-1 . 15-1 15-2 . 15-2 15-3 . 15-2 16 16-1 . 16-1 2 i i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-3 i i 2 6 WARNING !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

XL-OMV0002

20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29

XG_-OMV0028

12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

HEAVY DUTY STOPPER CYLINDER

B Sealant tape Expose approx. 1 thread Figure-3 3-3.

CJP2-OM0002K

H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 4 9 14 19 14.5 11.5 23.0 6 5 10 15 20 25 30 15.0 11.5 23.0 10 5 10 15 20 25 30 35 40 45 18.0 10.5 21.0 16 5 10 15 20 25 30 35 40 45 20.0 13.0 26.0 * The above numbers are references for the mounting positions of those auto switches that detect a stroke end.

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

VDW Series

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

PSxx-OMF0005CN

robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

VEX-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

ATX-OM-F004E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

DOC1020530

Power off Power on (0) (A): Ready-off, Servo-off Not ready to switch on (1) (15) Switch on Fault disabled (2) (7) (12) (10) (14) Ready to switch on (3) (6) (B): Ready-on, Servo-off (8) (9) Switched on (4) (5) Fault reaction active (16) (C): Ready-on, Servo-on Quick stop Operation (13) active enabled Error occurs (11) Transition by slave Transition by master Transition by slave or master FSA

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Uniaxial Electric Actuator Series LJ1

0 2 4 6 8 10 0 5 10 20 15 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 a=1000 a=3000 a=1000 400 400 L3 mm L3 mm L3 mm a=2000 a=2000 a=2000 400 a=3000 a=3000 a=1000 a 200 200 200 L1 M1 0 2 4 6 8 10 0 5 10 20 15 0 5 10 15 Work load (W) kg Work load (W) kg Work load (W) kg Mounting position Model LJ1S10 LJ1S20 LJ1S30 Direction of load movement 30 150 300 a=500 a=500 a=500