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lines in clean room environments TPH 06 04 B 20 Tube O.D.

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

Formula for Obtaining the Set Value A B ZSP P_1 or P_3 P_2(H_1) or P_4(H_2) PSE200 PSE300 P_1(P_3)=A-(A-B)/4 P_2(P_4)=B+(A-B)/4 Hi Auto-shift input PS H_1(H_2)=(A-B)/2 Lo ISA B Switch output response time at time of auto-shift input A Auto-shift input time C Precision indicator setting PSE PSE200 PSE300 15 ms or less 10 ms or more This function eliminates slight differences in the output

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

Red(+) How to Order VZ Timer circuit Diode LED Coil M3 T L Z 1 SY1 3 5 Body ported VT 1 2 VT Black(-) 4 5 T M Z 1 SY1 Base mounted 1: Inrush current, 2: Holding current VP T> 1 2 3 4 VG Actuation Applied voltage 24V 1 2 Normally closed Nomally open VP Enter in the same way as standard models. 0V Option Standard Large flow capacity style A

Mounting hole for hexagon socket head cap screw Air port size Rc CC CC Oil draining hole Rc 1/4 Oil port size Rc (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 L Dimension (mm) 700 800

Replacement Actuator (Cylinder) CY1F R B 10 Stroke Note) -XB10 or -XB11 is not required at the end of the part number for intermediate or long strokes.

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Symbol Description Applicable shaft type XA1 to XA24 Shaft type pattern1 W XA31 to XA58 Shaft type pattern2 S, J, K, T, Y XC1 Add connecting ports W, S, J, K, T, Y XC2 Change threaded hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation

T EA XY QB Note1) PB EA approx. T QW EB Adjustment bolt MAX. approx. LZ LL LW (Retraction end with no adjustment) Adjustment bolt For actuator cylinder mounting Hexagon socket head set screw XAH7 depth XL Set screws (4 positions) For shock absorber fixing Shock absorber (2 pcs.) CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

4 0 N 2 B S X80 2 0 3 0 ITV 33 DeviceNet compatible Model 2000 type 3000 type 2 3 Thread type Pressure range Rc(PT) NPT NPTF G(PF) Nil N T F Cable connector type 0.005 to 0.1MPa 0.005 to 0.5MPa 0.005 to 0.9MPa 1 3 5 Without Straight type 3m Nil S Option (bracket) Port size Without bracket Flat bracket L-bracket Nil B C 1/4 3/8 2 3 Specifications ITV2050 ITV3050 ITV2030 ITV3030 ITV2010 ITV3010

T Body size Pilot type Valve stations Port size 1 22 2 stations P , R A Internal pilot 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 2 Common external pilot 8 2 8 stations 3 8 1 4 A B C 2 stations 1 Internal pilot 0 1 For VY140 3 8 4 2 Common external pilot 3 8 1 2 6 Dimensions 6 stations VVEXB Connection mark All types