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C a u t i o n Use a speed controller to adjust the cylinder drive speed, gradually increasing from a low speed to the desired speed setting. 2-6. Directional control If the direction of cylinder operation is changed, use conforming solenoid valve from our various solenoid valves. W a r n i n g Design a circuit that prevents lurching of a driven object (piston).

Basic inertia moment 2 r m I = m : Weight of load (kg) r : Load center of gravity and distance of rotation axis. (m) r m Fig. (10) Inertia moment This shows inertia moment of m (weight) at r from the rotation axis. Calculation of inertia moment depends on the shape of the object.

(P2) PB Power consumption DC Holding Inrush Apparent power AC Air operated 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 10 (P2) Manual override VNA11 VNA12 12 (P1) 12 (P1) External pilot solenoid 1 (A) 2 (B) 2 (B) 1 (A) 17-4-7 4 Series VNA Port size 6A, 8A, 10A Applicable cable O.D. 6 to 8 (D.T) 125 (Conduit terminal: T DIN terminal: D) 108.2 (Grommet terminal: E) 106.7 (Grommet: G) 63 (Air operated

Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery/equi pm ent or at t em pt t o rem ove t he product unt i l saf et y i s conf i rm ed. A.

97.5 96 97.5 144 154 10 8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL

lock 0x0 Refer to P.4 Device Lock 0x0010 (16) 0 R Vendor name SMC Corporation 0x0011 (17) 0 R Vendor text www.smcworld.com 0x0012 (18) 0 R Product name e.g.

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

0 o D-D C-C B-B A-A !0 o e !1 e !1 w y w y q q IN OUT IN OUT u r t u r t i i Component Parts Replacement Parts Part no. AWG20 AW20P-340AS AF20P-060S AR20P-150AS C2SFP-260S C2SF GB2-10AS ARG20P-400S ARG20P-420S Material AWG20 AWG30 AWG40 ZDC ADC PBT POM Material No. No.

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s R, Rc, NPT, G)> VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Detaching To detach a socket from a connector, pull out the lead wire while pressing the sockets hook with a stick having a thin tip (approx. 1mm). If the socket will be used again, first spread the hook outward. 9 VFR2000-OMH0002-A VFR2000 Series 5 Port Solenoid Valve / Specific Product 3 10 Be sure to read before handling.

Symbol Nil R S RS Specifications Internal pilot specification External pilot specification Internal pilot specification/Built-in silencer External pilot specification/Built-in silencer Mounting position Symbol Applicable stations B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U D side U side Both sides M Special specifications Indicate special specifications separately on a manifold

Note 5) For the ITV1000 to 3000 series, a 10-bit input (parallel) through a sequencer is available for -X93, -X157 (CE-compliant).

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.

x 1.25 M10 x 1.25 M8 x 1.25 MM NN Z 40 32 25 20 Bore size 50 45 45 41 16 13 13 13 6 6 5 8 8 8 5 4 4 4 75 75 75 M26 x 1.5 M20 x 1.5 26-0.033 0 26-0.033 0 M26 x 1.5 32-0.039 0 8 10 36 82 M32 x 2 25 Series CM2R 10-/1121-/22Direct mount type cylinder 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto

VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

A CAT.ES100-43 A For General Fluids High Precision Digital Pressure Switch F/ISE ZSE 50 60 50 60 Series High precision/High resolution pressure switch. Applicable for pressure detection with a wide range of fluids, by using a stainless steel diaphragm. Pressure detection for a wide range of fluids.