Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

Process Valve Series VNA

32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

AC Servo Motor Driver (Pulse input type)

(Note 2) Alarm deactivation Display Name Alarm code AL.92 Battery cable Press disconnection warning Display CN1 CN1 CN1 Name "SET" on Alarm AL.96 Home position setting Power 22 23 24 current reset error OFF ON (bit2) (bit1) (bit0) alarm (RES) AL.99 Stroke limit warning screen.

AC Servo Motor Driver (SSCNET /H Type)

When the logic of FLS and RLS is set to "positive logic" using Pr.22, Input signal logic selection", positioning control can be performed, even if FLS and RLS are not wired. -58- 7.4 Operating conditions The following conditions must be satisfied in order to start operation.

ZQ-OM01601

,ONOFF ON-OFF ON (22 -) "digit" 0 () SI ONOFF ON 12 - ON (22 -) (OUT1) "" 22 5R.D.(5) () "()" () F () 13 - ,FG 14 - NPN NPN 2 26.4V 80mA 2 V NPN (ZQ1-LW6-N-A) PNP PNP 2 80 mA2 V PNP (ZQ1-LW6-P-A) 15 - 133 1 1 1 1 16 - OUT1 (P_1),ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2 OUT2ON (P_1)OFF ((P_1)(H_2)),ON ONOFF H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (

Vacuum Gripper

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Specifications Specifications Bore size CY3B Bore size CY3B Applicable series Applicable series 15 to 40 15 to 40 Construction Construction CY3B CY3B Special bearing Special bearing Dust seal (felt) 22 Series CY3B/CY3R Made to Order Specifications 3 Contact P/A for detailed specifications, lead times and prices.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 2522 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50

Parallel Type Air Gripper Series MHZ

Kit includes items 21, 22, 23 and 24 from the table above. MHZA6-PS Seal kits consist of items 21, 22, 23 and 24 in one kit, and can be ordered using the seal kit number.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Self-seal Fittings Series KC

M1 L M2 D 4 KCH04-00 KCH06-00 KCH08-00 KCH10-00 KCH12-00 42.1 45.8 52.8 59.8 63.5 10.4 12.8 15.2 18.5 20.9 2.6 6.8 16.2 25.6 35.4 18 19 21.5 24 25.5 16 17 18.5 21 22 2.6 6.8 13.1 20.4 30.4 5 8 11 18 24 6 8 10 12 Note) D: max. diameter Straight plug for frequent use: KCH Applicable tube O.D.

3 Port Solenoid Valve SYJ300/500/700 Series

Specifications Applicable model Base mounted type (SYJ714R,SYJ724R) 30inHg~100(--100kPa~0.7) 22~100(0.15~0.7) External pilot pressure Main pressure Operating pressure range PSI(MPa) Note) Externally piloted body ported valves(SYJ7 2R) can only be used on the manifold.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

High-precision Digital Pressure Switch

((Refer to page 53) ((Refer to page 24) (Refer to page 20) (Refer to page 22) : The outputs will continue to operate during setting. : If a button operation is not performed for 30 seconds during the setting, the display will flash.

 

Symbol 16 mm 22 mm Pilot port position Application Example Cleaning equipment 5 6 Symbol q w e r Position Applicable tubing size Nil 2 3 4 Tubing outside diameter 22 mm 26 mm 32 mm Applicable series LVP5 Symbol 16A 20A 25A Refer to the above.

30

22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12