Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

•

(Different surlaces., P-Z1O 15 ' OS 11 0 11 5 ~~ Stune sulface) With 1 pc. 2 l'O+40~ 11 5 +40 ) o.Y7.P With n pcs. 15 + 401 n 221 , , D-Y590 105+40(0 4) , 1n 4 (n =4, 8, 12. 16) .Y7OW r D'-''-'=~__'_-r_' (,,"~=_=2 . 4. 6. 8..) (n = 4. 8. '2" ,-,-'6 ",.","),-__",( " :..: = ",4 ",.-,, 8!

CRB2/CRBU2/CRB1

Note) These items (No. 11, 13, and 14) consist of auto switch unit and angle adjuster. Refer to pages 84 and 85 for detailed specifications.

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

C95

12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18 20 23 27 30 51 54 65 67 86 96 32 36

Electric Actuators

SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

IDX-OM-W032

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4 . 12-3 13 13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDFA Series i-2 i 3 IDX-OM-W032 i i 2 6 WARNING !

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 50mm, Option: C (Rubber Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 20mm, Option: Standard (Rod End Female Thread), Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 10mm, Option: C (Rubber Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 100mm, Option: C (Rubber Bumper), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 10mm, Option: M (Rod End Male Thread), Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, 0.5m, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 100mm, Option: CM (Rubber Bumper,Rod End Male Thread), Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: 4 pcs.

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 10mm, Option: C (Rubber Bumper), Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5m, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 16mm, Stroke: 100mm, Option: C (Rubber Bumper), Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: L (3m)