Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

DIGITAL FLOW MONITOR. O20. 39.00000 lb. MONITOR, DIGITAL FLOW.

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

70astamb1

L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ R1 U1 R1 NX A A1 MM CA2 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are attached

mb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

Power Valve: Economy Valve Series VEX5

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System A B C D E F G Solenoid valve Speed controller AS420-04 AS500-06 AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 Tubing diameter x Length SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m Silencer AN40-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ None N (Example) H7CN 3 m L (Example) M9NWL Since there are other applicable auto switches than listed above, refer to page 14 for details.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Plate Cylinder with Lock Series MLU

6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Brake mechanism added

JIS D 1601 Impact resistance 30 G, 3 times at X, Y, Z Enclosure IP65 (IEC standard) Except connector part Extension cable (Option) 5 m, 10 m, 15 m, 20 m CE2 Non-lube Double acting 40, 50, 63 80, 100 Spring and pneumatic lock Rod Boot Material Symbol Rod boot material Maximum ambient temperature J Nylon tarpaulin 60C Note) Digital error under Controller (CEU2), Counter (CEU5) is included.

Compact Cylinder with Air Cushion Series RQ

Y Bore size (mm) 4-LD LS + Stroke A + Stroke LG LH LX LY LZ X Y 3.2 LZ 32 4 57 57 11.2 30 71 5.8 40 4 64 64 11.2 33 78 7 Rod end male threads 50 5 79 78 14.7 39 95 8 Rod end nut L1 Front flange type mm Front flange type/RQF, RDQF Bore size (mm) Stroke range (mm) A B FD FT FV 20 to 100 32 37 5.5 8 48 54 20 to 100 40 M FV 44 5.5 8 54 61 30 to 100 50 49.5 6.6 9 67 67.5 mm 4-FD FT Bore size (

Round Type Hydraulic Cylinder

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked "" are produced upon receipt of order.

CQS

F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire 24 V Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced

TABLE OF CONTENTS

Housing J Yoke For Leads Y Non-molded coil or Molded Mounting Bracket B Series 20 E.P.

CE

2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

AR20-B to AR60-B

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

MGP

How to Order 20 M Stroke Bore size MGP Bearing Slide Ball bushing bearing M L Copper free 3.17-11 Series MGP Construction Series MGPM Series MGPL MGPM12 to 25 MGPL12 to 25 !9 q i !8 !7 u !6 !4 @1 w @3 !0 !2 @2 r o e @4 !0 y !3 12, 16 under 50 stroke 12, 16 over 30 stroke !