VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Table of Contents

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron NDH10 NX Applicable

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

&snac

p r o x i m a t e 2 Y e a r s .

ITV-E

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

O

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

O

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

A

A U T O D R A I N S Y M B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

DO Without connector With connector Y DIN terminal (Type Y) YO Without connector Note) Do not replace V111 (G, H, L, M, W) with V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

Profi-E

For i nduct i ve l oads such as sol enoi d val ves and rel ays, m ake sure t o t ake m easures agai nst l oad surge. Ensure t he pow er suppl y i s cut bef ore rem ovi ng t he connect or, t o avoi d t he i m pact of chat t eri ng. For saf et y and i m proved noi se i m m uni t y, keep t he ground as short as possi bl e. The ri ght angl e cabl e connect or does not rot at e.

CC-Link-E

Be sure t o cut t he pow er suppl y t o t he product w hen cut t i ng t he pressure suppl y. The product i s adj ust ed t o each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory. Avoi d unnecessary di sassem bl y or rem oval of part s, as t hi s m ay cause f ai l ure. 3 CAU TI O N Take t he f ol l ow i ng m easures agai nst m al f unct i on due t o noi se.

Aluminum High Vacuum Angle Valve

Without auto switch (without built-in magnet) D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/Mounting

CQ2

Bore size Bore size Bore size Bore size Foot SCQ2 #2 (#2+#12+#14) Front Flange SCQ2 #3 (#3+#12+#14) Rear Flange SCQ2 #4 (#4+#12+#14) Double Clevis SCQ2 #5 (#5+#12+#14) 2.3-17 Series CQ2 Accessories Single knuckle joint Double knuckle joint I-G012, I-Z015A I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G012, Y-Z015A Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 Material: Rolled steel Material: Cast

15

Z M1: Pitch moment Y X M2: Roll moment Static moment calculation by mounting type [Horizontal mounting] [Vertical mounting] [Ceiling mounting] [Wall mounting] M2 M1 A M2 M3 M3 M2 M1 A Y x y Z x z Y x y m x g X X Z y z m x g X M1 m x g Y m x g Table 2.

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

Thermo-chiller/Rack Mount Type

Option symbol Y With Feet/Without Rack Mounting Brackets A HRR HRR (U) Y Air-cooled refrigeration 433 Water-cooled refrigeration U HRR W Y With feet/Without rack mounting brackets A 27 Instead of the 19-inch rack mounting brackets, the product comes with rubber legs under its base. 280 76.5 Bolt for fixing the anti-quake bracket 79 392 M8 stud bolt Model Dimension [mm] A HRR010-m-m-mY 247

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron Courtesy of Steven