MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-5-1 2 Low Friction Cylinder Application Example (Metal Seal Type) Series MQQ Series MQQ Pressure control with fine pressure variations Low breakaway pressure Low

CY1

Refer to page 30 for details regarding Series CY1S with shock absorber. 23 Series CY1S Model Selection Method 1 Operating conditions E: Kinetic energy of load (J) W V 2 E = x () 2 1000 Es: Allowable kinetic energy for intermediate stop using an air pressure circuit (J) Ps: Operating pressure limit for intermediate stop using an external stopper, etc.

Pilot Operated

A, B, G, H, J, L) (Nil, A, B, G, H, J, L) 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V (D, E, N, P) Note) VXD2130 AC VXD21 4 5 Model VXD22 6 7 VXD23 8 9 DC specification is not available.

Modular Type Regulators Series AR

piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D K F J H J H J H J H J AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 12.5 11 M5 x 0.8 58 M18 x 1 13 0 26 26 25 1/16 Note 2) 28 27.8 26.5 28.5 2 1/8, 1/4 40 94

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67

New

f J J J IN OUT IN OUT 2 x M Depth 5 H 2 x M Depth 5 G A H i G A 2 x P Port size B1 B b B1 B 2 x P Port size DIN terminal Cable 6 to 12 G1/2 Q F S Bracket mounting hole dimensions D a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) (44) 31.5 6.5 R C E 10.5 IN OUT 2 x M Depth 5 G A H 2 x P Port size B1 B (mm) A B B1 C D E F G Port size P H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40

58

Foot: CS2L S + Stroke H K A AL F With rod boot Port Width across flats KA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM D B E e LH LY 4 x LD f l LX Y N X LS + Stroke N X Y LT ZZ1 + l + Stroke h + l B C ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) C B A AL B D E F G LH LS J V W K KA LD 125 140 160 50 47 Up to 1600 143 115 143 32 71 43 15 85 188 M14 x 1.5 15 17 15 27 19 50 47 Up to

New

H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge Dimensions Size Port size voltage suppressor) A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4

MK

G5-S M thread CV F Note 2) E Note 2) MVGQ CC I thread length J RB 4-G through 2 x 4-H counterbore J R + Clamp stroke Q + 2 x Clamp stroke depth 3 D-X Through-hole/Both Ends Tapped Common (Standard) (mm) 20H J Model K L F E C B A D G Q V P Yh9 Z N I M O R S T U X 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 1 8 1 8 1 4 1 4 0 0.062 0 0.062 0 0.062 0 0.062 MK2B32 MK2B40 MK2B50 MK2B63 54 61 73 86 34 40 50

modular-press-e

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Electric Grippers

Bolt Max. tightening torque [Nm] Model LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 M2.5 x 0.45 0.3 M3 x 0.5 0.9 Finger M4 x 0.7 1.4 Attachment M5 x 0.8 3.0 Runoff space Runoff space M6 x 1 5.0 Needle shaped workpiece Thin plate workpiece M8 x 1.25 12.0 4.

Modular F.R.L. Pressure Control Equipment

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Electric Actuator

(Red l Green j Red) 3-wire 2-wire Wiring type NPN PNP Output type # Using flexible cable as standard.

1

3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less XA2 XA17 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 J: 5 mm or more, I :11 mm or less J: 5 mm or more, I: 11 mm or less H : M10 or more, X: 33 mm or less H: M10 or less 25 25 J: 6 mm or more, I: 13

Rotary Table

0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J] 1.210[J] 1.820[J] With adjustment bolt 0 to 190 Note2) With internal

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

%silltr

A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .

C85

Lubrication CG1 Nylon tarpaulin Max. ambient temperature 60C Rubber cushion/Double rod Rod boot MB Heat resistant tarpaulin Max. ambient temperature 110C MB1 Piston speed 50 to 1500 mm/s Rubber cushion CA2 0.02 J 0.03 J 0.04 J 0.09 J 0.27J 0.4 J Allowable kinetic energy Air cushion/Double rod CS1 Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J C76 Non-rotating accuracy 1 30' 1 30' 1 1 0