SMC Wireless System PROFINET compatible

A 4 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, DC24 V +10/-5%, 2 A 8 A 4 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

CP95

(mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120

CP95

5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35

Series AK1000

160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600 Delivery pressure (kPa) -35 500 -48 400 -61 300 -75 200 -88 100 -101 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Digital Flow Switch (Integrated display type)

2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 Flow CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Setting/display flow range 0 to 9 ft3 x10-1 Accumulated flow Min. setting/display unit 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/pulse ft3 x 10-2/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse

HEC_W-E

UPPER AND LOWER LIMIT ARISES -9-2 FIG. 10-1 MOISTURE AIR DIAGRAM -10-3 vi Contents Table List Page No.

SMC Wireless System EtherNet/IP ® compatible

A 4 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, DC24 V +10/-5%, 2 A 8 A 4 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

Digital Flow Switch (Integrated display type)

V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

IDX-OM-W023

M 10 M IDU8E/11E/15E1-10/20 10-1 ( ) IDU Series 10-1 10 1 IDX-OM-W023 10 M 10-2 ADM200 IDU8E15E1-10-M IDU8E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W (R1/2) (Rc3/8) Rc1/2 26 Rc1/2 IDU Series 10-2 10 2 IDX-OM-W023 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W023 11 R

IP8001 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 13 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Digital Flow Switch (Remote type monitor unit)

x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard condition.

Digital Flow Monitor

V) 1 0 V 0.10 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

AC Servo Motor Driver (SSCNET /H Type)

Refer to LECSS2-T Operation Manual,section 3.5 for input/output signal details. -10- 3.3.2 Source Sink I/O interfaces Connection example An example wiring diagram for Sink I/O is shown below Driver Servo amplifier () CN8 (Note 16) Short-circuit connector (Packed with the servo amplifier) 10 m or less driver) (Note 12) CN3 10 m or less 24 V DC (Note 10) 3 DOCOM (Note 15) Main circuit power

PFxx-OMU0002

Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x