Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP 48.5 41

Thermo-dryer

Correction Factors Data Inlet Air Temperature Data Outlet Air Pressure Dew Point Data Air Flow Capacity A C E Inlet air temperature F (C) Correction factor Outlet air pressure dew point F (C) Correction factor 3.5 (100) 7.1 (200) 10.6 (300) 14.1 (400) 17.6 (500) 21.2 (600) 24.7 (700) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6 68 (20) 1.36 37.4 (3) 0.50 77 (25) 1.24 41

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

15.2 18.5 18.5 20.9 18.5 20.9 18.5 20.9 65.9 67.8 65.9 67.8 75.6 77.7 75.6 77.7 75.6 77.7 84.2 85.8 84.2 85.8 84.2 85.8 69.9 71.8 69.9 71.8 81.1 83.2 81.1 83.2 81.1 83.2 88.2 89.8 88.2 89.8 88.2 89.8 63.9 65.8 63.9 65.8 73.6 75.7 73.6 75.7 73.6 75.7 82.2 83.8 82.2 83.8 82.2 83.8 17 19 17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

25.2 30 20 20 10 30 60.5 (N02L: 61.5) 2 x M3 x 0.5 thread depth 4 ZSE ISE Piping port 02L: R1/4 N02L: NPT1/4 3.5 ZSP PS 8.8 Atmospheric vent port 2.6 ISA PSE IS 10.3 29.5 ISG ZSM Width across flats 17 M5 x 0.8 thread depth 5 41 2 25.2 49.5 58.8 64.8 Piping port Rc1/8 Piping port URJ1/4 Piping port TSJ1/4 -A2L: URJ1/4 -B2L: TSJ1/4 -C01L: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket

Card Motor

(500) Vertical: 1.8 (50) Horizontal: 17.6 (500), Vertical: 3.5 (100) Optical linear encoder (incremental) Sensor 30 None 1.25 Provided 30 None 1.25 Provided 30 None 1.25 Provided Pushing operation 6 1 to 4.8 1 to 5 1 to 3.9 Positioning operation Positioning repeatability (m) Note 4)5) Accuracy (m) Note 4)5) 90 5 90 5 90 5 Measurement Maximum speed (mm/s)Note 6) 100 10 100 10 100 10 400 41

Industrial Filter FGD Series

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

Cylinder with Lock/Double Acting, Single Rod Series CNA2

Contents Bore size (mm) MB40-PS MB50-PS MB63-PS 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR MB80-PS 42 $3 44 $5 46 Release piston seal NBR MB100-PS 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

Hygienic Design Cylinder Series HY

25 st or less 26 to 50 st 51 to 100 st Over 101 st 25 st or less 26 to 50 st 51 to 100 st Over 101 st 32 40 50 63 83 83 90 90 113 113 120 120 146.5 146.5 161.5 161.5 73 73 80 80 16 16 20 20 106.5 106.5 121.5 121.5 116.5 116.5 131.5 131.5 131.5 131.5 146.5 146.5 98 98 105 105 48 54 64 78 112 120 148 162 18 18 23 23 44 44 60 70 110 118 146 158 24 27 32 39 78 86 110 124 20 20 25 25 5 5 6 6 41

AWM20 to AWM40

29.5 30 29.5 AWM40/AWD40 28 27.8 1/4, 3/8, 1/2 M42 x 1.5 1/4 80 1.5 38.5 49 42.5 76 70 239 92 37.5 38 37.5 Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M N Q R S T U V W Y Z B B B B B AWM20/AWD20 30 34 44 5.4 15.4 55 2.3 30 28.5 14 6 177 164 160 AWM30/AWD30 41