INFORMATION Step Motor Controller 5 types of communication protocols New New

When removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

Dedicated Controller

No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination. Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation.

Heat Resistant 2-Color Indicator

Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto switch (Sensor section) 16 to 25 Indicator light A 17.5 B [mm] Auto switch model Bore size D-M9 J A B U 16 9.5 7 21 20 9.5 8.5 23.5 25 9.5 9 27 32 11 8 29 40 15 10.5 31 50 13 13.5 36 63 15.5 16.5 41.5 22 U 64.5 4 Auto switch (Amplifier section) 32 to 63 A 17.5 B U Note) Adjust the auto switch after

Wireless System

unit) DA refresh time 10 ms or less (the output connected to the master unit) Input/Output Output type EX600-WEN1: Source/PNP (COM) EX600-WEN2: Sink/NPN (+COM) Valve output Number of outputs Max. 32 points (0/8/16/24/32 points) Connected load Solenoid valve with surge voltage suppressor of 24 VDC and 1.5 W or less (manufactured by SMC) Number of slave units connected Max. 127 units (0/15/31

Fluoropolymer Tubing Variations

Color Applicable fluid Fluid Note 1) KF M Insert Fittings KF series Stainless Steel 316 Insert Fittings KFG series Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ series H/DL L/LL Applicable fittings Note 2) Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) KC 20C 100C 200C 260C 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

& Tubing Air Cylinders Rotary Actuators 10 9+ST 4 x M3 x 0.5 thread depth 3.5 8 2.7 6.7 2 x M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22-: Vacuum suction port 12-, 21-: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3 L M8 x 1.25 x 8 L (Bolt holder) (Hexagon socket set screw) 31

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 2 position 3 position Single 10-SQ2131 31 or less 0.51 0.71 0.18 0.17 3.1 2.3 24 or less 140 Rubber seal Double 10-SQ2231D 26 or less 0.51 0.71 0.18 0.17 3.1 2.3 20 or less 155 Rubber seal SQ2000 10-SQ2331 Closed center 44 or less 0.46 0.47 0.29 0.17 1.8 1.9 34 or less 175 Rubber seal Exhaust center 10

Series AP3100

Specifications AP3100 AP3102 AP3150 AP3157 AP3125 Select compatible materials of construction for the gas Operating Parameters Gas Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) Vacuum to 3000 psig (20.7 MPa) 1) Operating pressure Vacuum to 1300 psig (9.0 MPa) Proof pressure Burst pressure Ambient and operating temperature Cv 3) 4500 psig (31 MPa) 10 psig (69 MPa) -40 to

Series AP3500

Select compatible materials of construction for the gas Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv 2) Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) 4500 psig (31 MPa) 10 psig (69 MPa) 14 to 149F (10 to 65C) (No freezing) 1.0 0.7 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 3) Ra max

Manifold Regulator Modular Type ARM2500/3000 Series

End plate assembly 1 pc. 28 x 25 x 1.5 35 x 31 x 2 2500 3000 A B 756 Manifold Regulator ARM2500/3000 Series Dimensions Pressure gauge (Option) Pressure gauge (Option) (With pressure gauge) ARJ AR425 to 935 Panel mounting hole ARX ARM2500: 4 x 6 ARM3000: 4 x 7 AMR ARM ARM ARP IN (Common IN) IR-A ARM2500: 2 x 3/8 ARM3000: 2 x 1/2 IR IRV ARM2500: n x 1/4 ARM3000: n x 3/8 Gauge port n x 1/8 VEX

Model: 31, Orifice: 1 (1.5mm), Style: 0 (N.C., Single Unit), Option: J (Stainless Steel, Seals: EPDM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580

G)31/4, 3/85VX2341.960.550.750.1 to atmospheric pressure0 to 1.0580