Piping: Body Ported/Common SUP Common EXH, Stations: 3 Stations, A B Port Size: NPTF

Piping: Body Ported/Common SUP Common EXH, Stations: 4 Stations, A B Port Size: NPTF

Piping: Body Ported/Common SUP Common EXH, Stations: 5 Stations, A B Port Size: NPT

Piping: Body Ported/Common SUP Common EXH, Stations: 5 Stations, A B Port Size: NPTF

Piping: Body Ported/Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPT

Piping: Body Ported/Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPTF

Piping: Body Ported/Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPT

Piping: Body Ported/Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPTF

Piping: Body Ported/Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPT

Piping: Body Ported/Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 20 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

2/3 Port Valve for Various

LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

High Purity Chemical Valve

Port size 1/4 Symbol 02 Construction q e w Description Material Parts list R P No. 1 Actuator section PPS 2 Body PFA r 3 Diaphragm PTFE 4 End plate Stainless steel 479 Series LVA Dimensions P R 30 41 26 A M5 x 0.8 Pilot port (3 x NPT1/4) 3 x Rc1/4 Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2 x M5 x 0.8 Depth 6 20 480 Manually Operated Integral Fitting Type/Threaded Type Series

AME

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

DOC1001322

If foreign matter with a size of 20 m or more are likely to enter, install the particle filter. Filter Rc1 3 20m HRS-PF005 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve(Part of thermo-chiller) Rc3/4 Y-strainer Rc1/2 #40 Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, install the particle filter.

ML2B

For detailed specifications, refer to page 10-20-1. RB Electrical entry (Fetching direction) D-Z80 Grommet (In-line) J Type Model Features Without indicator light Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available. For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17