212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Compact Vacuum Ejector Series ZA

pressure 80 80 40 Suction flow (l/min(ANR)) Air consumption (l/min(ANR)) 1 2 3 4 5 6 7 8 Left Right Vacuum pressure (kPa) Vacuum pressure (kPa) 70 ZA1071-K15L-FP1-M2 ZA1051-Q15L-FB-M1 ZA-BP1 60 60 30 Vacuum (V) port 50 40 40 20 Air consumption 30 20 20 Suction flow 10 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) 851 Series ZA Specifications General

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

T

Barb one-touch Reducer 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 15-6-28 5 Miniature Fittings Series M Barb fitting: M-3AU-2, M-5AU-2 Applicable tubing O.D. x I.D.

HAW

200 300 400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 HAW22 17 HAW37 25 Maintenance 7000 8600 10 34.5 36 37 40 44 46 38 40 42.5 43 49 54 36 Caution HAW55 1.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

/8, 1/2 70 156.2 25.5 35.5 38.4 40 35.5 HF2-BFD40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 16 Document No.AMX-OMZ0106 Revision history Rev.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

end (E) 32 40 Head side pivot (C) 12 12 20 40 Double rod (W) Block mount (R) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch.

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: 42 (A Port Side Ported; 42S: Solenoids on the Same Side of A Port), Stations: 04, Port Size: 01 (Rc 1/8), Thread: N (NPT)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 42 (Common SUP, Common EXH, Side Ported), Stations: 4 Stations, Port Size: 01 (1/8), Thread: N (NPT)

Piping: Base Mounted Common SUP Common EXH, Stations: 4 Stations, A, B Port: NPT 1/8

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPT1/8

Solenoid Direction: Same Side as A Port, Piping: Opposite Side of A Port, Stations: 4 Stations, Port Size: Rc 1/8, Thread: NPT, Bracket: -, CE Approval: -

Solenoid Direction: Type 40: A Port Bottom Ported; Type 42: Opposite Side of A Port, Piping: Opposite Side of A Port, Stations: 4 Stations, Port Size: Rc 1/8, Thread: NPT, Bracket: -, CE Approval: -

Manifold Type: Base Mounted, Bar Manifold, Compact, Individual Wiring, Valve Stations: 4 Stations, A, B Port: NPT1/8, Q: -

Piping: Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: NPT 1/8

Manifold Type: Base Mounted, Valve Stations: 4 Stations, A, B Port: NPT1/8, CE Marked: -

Manifold Type: Base Mounted, Bar Manifold, Compact, Flat Cable, Valve Stations: 4 Stations, A, B Port: NPT1/8

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPT1/8, Bracket: -