IDX-OM-W016

/h 23 m3/h 29 m3/h 32 m3/h 39 m3/h 72 m3/h Outlet air temp. 10C The data for ANR is referring to the conditions of 20C, 1atm. pressure & relative humidity of 65%.

M Series

X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.

MHK2

mounting attachment) M3 x 0.5 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 0.05 4 7 7 Note) For single acting, one port is used as a breather port. 2.3 17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5

MHK2

17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5 thread depth 6 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 20 +1.2 0 4 8 10 0.02 41.6 30 20 3 22 43 0 0.2 Closed 9 26 3H9 depth 3 +0.025 0 15 36 13 57

Wedge Cam Operation Provides

for mounting attachment) M3 X 0.5 (Finger closing port) Groove position for auto switch mounting (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 -0.05 4 7 7 Note) For single acting, one port is used as bleed port. 2.3 17.5 M3 X 0.5 (Finger opening port) MHKL2-12l/Long stroke model 9 20 2-M3 X 0.5 thread depth 5 (Mounting thread) 3H9 depth 3 +0.025 0 2-M3 X 0.5 thread

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

SYJA300

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

VQ

Dimensions Grommet VQ1l0l-lGlM5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 Mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking style manual override 30.7 28 11 A P (4.1) (5.9) (5.9) 7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4

EX120/121/122

indicator LED M3 Ground terminal Position indicator LED LINK OUT GATEWAY UNIT EX500 SERIES IN EX500 SERIES GATEWAY UNIT (M12, 5 pins, socket) LAN PE PE PWR PWR LINK LINK SOL 100 L RUN OUT Power source connector Note 1) MS L ERR.

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

P EXH V V V V PE ZQ1 1U-K1 5 6 E F F K E F F KType J1 ZQ1 1U-J1 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Supply valve 62.8 Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 (63.1) (63.1) Vacuum (V) port (M5) Note 4) SMC PE 20.3 29.4 3 20.2 P

IDX-OM-W010

M3 screw tightening torque: 0.6~1Nm. During wiring work, do not touch other sections except terminal block. Attach the cover or the rear panel as it were.

IDX-OM-V024

/h) (282 m3/h) (420 m3/h) (570 m3/h) dew point Standard Outlet air condition 45oF 155SCFM 215SCFM 314SCFM 406SCFM Air flow capacity pressure (7.2oC) (264 m3/h) (366 m3/h) (534 m3/h) (690 m3/h) (ANR) dew point (Note2) Outlet air 50oF 177SCFM 251SCFM 353SCFM 459SCFM pressure (10oC) (300 m3/h) (426 m3/h) (600 m3/h) (780 m3/h) dew point Rated Inlet air pressure 100 psi (0.7MPa) condition Inlet

Air preparation filter

at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.

Wedge Cam Operation Gripper Series MHK2

X 0.5 thread 4 deep 15 3H9 3 deep +0.030 0 2-M3 X 0.5 thread 6 deep 13H9 1.5 deep +0.043 0 4-M4 X 0.7 thread 8 deep Bottom hole dia. 3.4 through-hole 0 -0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 deep +0.030 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Attachment mounting thread) M3 X 0.5 (Finger closing port) Groove position

ø2 One-touch Fittings Series KJ

(mm) Connection thread Model KJL02-M3 KJL02-M5 2 M3 x 0.5 M5 x 0.8 KJW02-M3 KJW02-M5 2 M3 x 0.5 M5 x 0.8 KJT02-M3 KJT02-M5 2 M3 x 0.5 M5 x 0.8 KJT02-00 2 Different diameter union "Y" Male run tee KJY Union "Y" KJU KJU Plug-in reducer KJR Applicable tubing O.D. (mm) Model Applicable tubing O.D. (mm) Model Applicable tubing O.D. (mm) Connection thread Model Applicable tubing O.D.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 8 6.5 N x M3 x 0.5 thread depth 4.5 Note 1) Note 2) Retraction end adjuster Extension end adjuster 3 depth 3 +0.03 0 22.5 (Extension end adjuster) 3.5 6.5 4 0.7 6.5 (Extension end adjuster) 0.3 22.2 15 17 36 24 16 32 1 12 16 F 3 depth 3 +0.03 0 5 4 x M3 x 0.5 thread depth 4 2 N 1 x F 10 30 3 x M4 x 0.7 thread depth 6 M 24 14.6 KA NA x M3 x 0.5