Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 18 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

PS-OMH0005CN

No.PS-OMH0005CN-D // PSE200 2 8 9 10 13 13 15 17 18 22 24 27 28 29 36 36 37 -1No.PS-OMH0005CN-D (ISO/IEC)(JIS) 1 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

4-channel Flow Monitor (Remote type monitor unit)

Return to measurement mode. -24No.PF-OMH0003-F Flow specification when [U_2] is selected by the unit selection function PF2A20 series Model PF2A20 Applicable sensor PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Rated flow range 3.5 to 35.5 18 to 176 3.5 to 35.5 7 to 71 18 to 176 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Instantaneous Setting/display flow range 1.0 to 38.5 8 to 186

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 10 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 14 to 18) for details.) 6 XL-OMV0017 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

RS2H-OM0045P

. -1516 D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm

Fieldbus Device Handheld Terminal

(Refer to page 41) -33No.EX-OML0011-C 1. Selection of parameter Explanation of screen a) Name of each parameter to be set b) The next parameter is displayed with the and buttons. c) Parameters that can be set in each unit only. d) Parameters that can be set in each channel only. 2.

HRX-OM-R039

PV SV 5.6 Alarm customize function HRSE Series 5-18 HRX-OM-R039 Chapter 5 Display and setting of various functions 26. Select temperature alarm monitoring method from the table below with [] key or [] key, and confirm by pressing SEL.

XLF Series

Period and scope of warranty The warranty period is 3 million cycles (for size 16, 25 and 40), 2 million cycles (for size 50, 63 and 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first. Note) The endurance will depend on the operating conditions (such as if the flow rate is large).

HEAVY DUTY STOPPER CYLINDER

Auto switch mounting bracket number: BQ6-032S Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 18 - 7-3. How to mount auto switch 7-3-1. D-M9/D-A9 When mounting an auto switch, insert it into the switch groove of the cylinder from the direction shown below.

E-MY2_E_D

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000

CYV

and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-40 2 Speed Controller with Residual Pressure Release Valve: Standard Type, In-line Type (Metal Body) Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. ASS ASR ASF 15-9-37 3 Construction Elbow type, Meter-out type Universal type Meter-out type (2) Meter-in type Meter-in type Component Parts No.

KS/KX

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

PF2D

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Component Parts Material No. Description o !0 u !0 !2 w y r !

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

VXR21/22/23

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum